Surface morphology and quality of a-Si:C:H films

Regularities in data from factorial experiments

“…Wood sanding oper. [ 3 Surface density Fine grinding [48] 2 3 Max grinding force 2 3 % pepi 2 3 Max motor current Ball burnishing of an ANSI 1045 [24] 2 4 Roughness 2 3 Grinding cycle time Abrasive wear of Zi-Al alloy [25] 2 3 Zinc 2 3 Surface roughness 2 3 Composite Leaching of manganese [49] 2 4 Mn Surface morphology of films [26] 2 5 Roughness 2 4 Fe 2 5 Stress 2 4 Al MIG process [27] 2 4 Penetration Aqueous SO2 leaching [50] 2 4 Extraction Mn 2 4 Reinforce 2 4 Extraction Fe 2 4 Width Ident. of radionuclide [ where t 0.025,df is the 0.975th quantile of the t-distribution and df is the statistical degrees of freedom.…”

Effects of process variables on properties and composition of a-Si:C:H films

“…There was also an interaction between these variables. Aside from the fact that increasing the ion energy tended to increase both the hardness and the intrinsic stress of the films, there was no other correlation between the analysis of the film stress 16 and that of the nanoindentation results. Increasing the ion energy when the TMS/Ac ratio was high produced an average increase of 75% in film hardness, but the same increase in ion energy improved the hardness by only 48% when the TMS/Ac ratio was low.…”

“…First of all, the inclusion of a roughness layer in the model improved the fit (decreased the MSE) significantly in all instances as might be expected, but the size of the improvement was (surprisingly) dependent on process variables during deposition. 16 In general, the atomic force microscopy (AFM) showed that the surface roughness was very small, ranging from 0.45 to 1.8 nm. In samples deposited at high ion energies the MSE decreased, on average, by 26 (a decrease of 86%) when the roughness layer was included.…”

“…The dependence of the optical properties of these films on the deposition conditions can be extremely complex. The system variables investigated here were the ratio of TMS/Ac gas flow rates, the argon flow rate, and the energy of the bombarding ions (a function of the bias voltage and the chamber pressure 16 ). of experiments.…”