Surface micromachining via solid electrochemical reaction on oxide ion conductors

Abstract

We propose a simple and novel route for the surface microstructuring of tough materials (glassy carbon, SiC, W and Mo) through a solid electrochemical reaction at a microcontact between the oxide ion conductor and target substrate. More specifically, the surface of materials was locally oxidized by an anodic electrochemical reaction with the oxide ion conductor via the microcontact under a dc bias. Since the oxidation products of the targets were gaseous or sublimable, a fine-patterned surface was obtained as a result of the continuous consumption of the oxidation products formed at the microcontact. The success of the proposed method may stimulate such conventional applications of oxide ion conductors.

Recent Advancements in EMM for Micro and Nanofabrication

“…The solid electrochemical cell consists of pyramid-like oxide ion conductor as cathode and SiC, W, and Mo as anode workpiece. Application of a DC bias to the cell induces the anodic electrochemical reaction of oxide ions ðO À 2 Þ at the microcontact between the conductor and the target in an inert atmosphere or in vacuum at 900-1150 C [9]. When the target forms volatile or gaseous products as a result of the reaction with ðO À 2 Þ or O 2 gas, it is expected that the target is steadily consumed during the electrolysis.…”