Electrochemical Micromachining

Joshi, Suhas S.; Marla, Deepak

doi:10.1016/b978-0-08-096532-1.01108-0

Cited by 21 publications

(15 citation statements)

References 54 publications

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“…At the anode, the metallic workpiece (M) undergoes oxidation thereby releasing the electrons. The reaction is known as anodic reaction and is represented as [24]:…”

Section: A C C E P T E D Accepted Manuscriptmentioning

confidence: 99%

A review on process capabilities of electrochemical micromachining and its hybrid variants

Saxena

Qian

Reynaerts

2018

International Journal of Machine Tools and Manufacture

178

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Electrochemical micromachining (micro-ECM) is an unconventional micromachining technology that has capability to fabricate high aspect ratio micro-holes, micro-cavities, microchannels and grooves on conductive and difficult-to-cut materials. Both academia and industry have the consensus that it offers promising machining performance especially in terms of high surface finish, no tool wear and absence of thermally induced defects. Furthermore in order to machine novel materials with extreme properties, novel hybrid electrochemical micromachining technologies are under development. With these hybrid micro-ECM technologies, capabilities of micro-ECM can be expanded by combining it with other processes. To fully exploit the potential as well as improve micro-ECM technology and related hybrid processes, a wide spectrum of multidisciplinary knowledge is needed. The present review systematically discusses process capabilities and research developments of electrochemical micromachining and its hybrid variants considering knowledge of both basic and applied research fields. After few introductory review articles in prior state of the art, this review fills an important gap in research literature by presenting first time an extended literature source with a wide coverage of recent research developments in electrochemical micromachining technology and its hybrid variants. This paper outlines the research and engineering developments in electrochemical micromachining technology and its hybrid variants, review of the related concepts, aspects of tooling, advanced process capabilities and process energy sources. It also provides new sights into technological understanding of micro-ECM technology which will be helpful in future engineering developments of this technology.

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“…At the anode, the metallic workpiece (M) undergoes oxidation thereby releasing the electrons. The reaction is known as anodic reaction and is represented as [24]:…”

Section: A C C E P T E D Accepted Manuscriptmentioning

confidence: 99%

A review on process capabilities of electrochemical micromachining and its hybrid variants

Saxena

Qian

Reynaerts

2018

International Journal of Machine Tools and Manufacture

178

View full text Add to dashboard Cite

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“…During the EP process, DC voltage is applied in between the tool (cathode) and the workpiece (anode). An electrolyte solution is supplied and fills the machining gap to finish the flow current and dissolve the workpiece [7]. In EP, the material removal rate is determined by electrical properties, electrolyte properties, and material properties [8,9].…”

Section: Introductionmentioning

confidence: 99%

Electropolishing Parametric Optimization of Surface Quality for the Fabrication of a Titanium Microchannel Using the Taguchi Method

Mahardika

Setyawan

Sriani³

et al. 2021

Machines

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Titanium is widely used in biomedical components. As a promising advanced manufacturing process, electropolishing (EP) has advantages in polishing the machined surfaces of material that is hard and difficult to cut. This paper presents the fabrication of a titanium microchannel using the EP process. The Taguchi method was adopted to determine the optimal process parameters by which to obtain high surface quality using an L9 orthogonal array. The Pareto analysis of variance was utilized to analyze the three machining process parameters: applied voltage, concentration of ethanol in an electrolyte solution, and machining gap. In vitro experiments were conducted to investigate the fouling effect of blood on the microchannel. The result shows that an applied voltage of 20 V, an ethanol concentration of 20 vol.%, and a machining gap of 10 mm are the optimum machining parameters by which to enhance the surface quality of a titanium microchannel. Under the optimized machining parameters, the surface quality improved from 1.46 to 0.22 μm. Moreover, the adhesion of blood on the surface during the fouling experiment was significantly decreased, thus confirming the effectiveness of the proposed method.

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“…The metal workpiece can act as the anode or cathode, and it has to be separated from the tool electrode by the working electrolyte solution. Due to the noncontact working mode, the tool wear problem is avoided compared to mechanical machining techniques . Since the kinetic rate of the metal electrode process is very fast, ECM has a rapid material removal rate regardless of the hardness of metal materials .…”

Section: Introductionmentioning

confidence: 99%

“…4 According to the electrochemical principles, ECM can be classified into two categories: (i) electrolytic machining based on anodic dissolution and (ii) electroforming based on cathodic deposition. 5 During ECM processes, a sufficient potential is applied between the metal workpiece and the tool electrode. The metal workpiece can act as the anode or cathode, and it has to be separated from the tool electrode by the working electrolyte solution.…”

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Confined Chemical Etching for Electrochemical Machining with Nanoscale Accuracy

et al. 2016

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In the past several decades, electrochemical machining (ECM) has enjoyed the reputation of a powerful technique in the manufacturing industry. Conventional ECM methods can be classified as electrolytic machining and electroforming: the former is based on anodic dissolution and the latter is based on cathodic deposition of metallic materials. Strikingly, ECM possesses several advantages over mechanical machining, such as high removal rate, the capability of making complex three-dimensional structures, and the practicability for difficult-to-cut materials. Additionally, ECM avoids tool wear and thermal or mechanical stress on machining surfaces. Thus, ECM is widely used for various industrial applications in the fields of aerospace, automobiles, electronics, etc. Nowadays, miniaturization and integration of functional components are becoming significant in ultralarge scale integration (ULSI) circuits, microelectromechanical systems (MEMS), and miniaturized total analysis systems (μ-TAS). As predicted by Moore's law, the feature size of interconnectors in ULSI circuits are down to several nanometers. In this Account, we present our perseverant research in the last two decades on how to "confine" the ECM processes to occur at micrometer or even nanometer scale, that is, to ensure ECM with nanoscale accuracy. We have been developing the confined etchant layer technique (CELT) to fabricate three-dimensional micro- and nanostructures (3D-MNS) on different metals and semiconductor materials since 1992. In general, there are three procedures in CELT: (1) generating the etchant on the surface of the tool electrode by electrochemical or photoelectrochemical reactions; (2) confining the etchant in a depleted layer with a thickness of micro- or nanometer scale; (3) feeding the tool electrode to etch the workpiece. Scavengers, which can react with the etchant, are usually adopted to form a confined etchant layer. Through the subsequent homogeneous reaction between the scavenger and the photo- or electrogenerated etchant in the electrolyte solution, the diffusion distance of the etchant is confined to micro- or nanometer scale, which ensures the nanoscale accuracy of electrochemical machining. To focus on the "confinement" of chemical etching reactions, external physical-field modulations have recently been introduced into CELT by introducing various factors such as light field, force field, hydrodynamics, and so on. Meanwhile, kinetic investigations of the confined chemical etching (CCE) systems are established based on the finite element analysis and simulations. Based on the obtained kinetic parameters, the machining accuracy is tunable and well controlled. CELT is now applicable for 1D milling, 2D polishing, and 3D microfabrication with an accuracy at nanometer scale. CELT not only inherits all the advantages of electrochemical machining but also provides advantages over photolithography and nanoimprint for its applicability to different functional materials without involving any photocuring and thermoplastic resists. Altho...

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Electrochemical Micromachining

Cited by 21 publications

References 54 publications

A review on process capabilities of electrochemical micromachining and its hybrid variants

A review on process capabilities of electrochemical micromachining and its hybrid variants

Electropolishing Parametric Optimization of Surface Quality for the Fabrication of a Titanium Microchannel Using the Taguchi Method

Confined Chemical Etching for Electrochemical Machining with Nanoscale Accuracy

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