A review on process capabilities of electrochemical micromachining and its hybrid variants

Abstract

Electrochemical micromachining (micro-ECM) is an unconventional micromachining technology that has capability to fabricate high aspect ratio micro-holes, micro-cavities, microchannels and grooves on conductive and difficult-to-cut materials. Both academia and industry have the consensus that it offers promising machining performance especially in terms of high surface finish, no tool wear and absence of thermally induced defects. Furthermore in order to machine novel materials with extreme properties, novel hybrid electrochemical micromachining technologies are under development. With these hybrid micro-ECM technologies, capabilities of micro-ECM can be expanded by combining it with other processes. To fully exploit the potential as well as improve micro-ECM technology and related hybrid processes, a wide spectrum of multidisciplinary knowledge is needed. The present review systematically discusses process capabilities and research developments of electrochemical micromachining and its hybrid variants considering knowledge of both basic and applied research fields. After few introductory review articles in prior state of the art, this review fills an important gap in research literature by presenting first time an extended literature source with a wide coverage of recent research developments in electrochemical micromachining technology and its hybrid variants. This paper outlines the research and engineering developments in electrochemical micromachining technology and its hybrid variants, review of the related concepts, aspects of tooling, advanced process capabilities and process energy sources. It also provides new sights into technological understanding of micro-ECM technology which will be helpful in future engineering developments of this technology.

Pulsed Electrochemical Micromachining in Stainless Steel

“…Electrochemical micromachining is today widely used for manufacturing semiconductor elements and thin metallic films [6]. In addition, electrochemical micromachining can be easily hybridised with other processes to broaden the process capabilities and material processing window [7].…”

Fast Fabrication of Complex Surficial Micro-Features Using Sequential Lithography and Jet Electrochemical Machining

“…Electrochemical micromachining (ECMM) is a promising technology for fabricating surface structures [ 1 ]. In contrast to chemical etching (CE) which uses caustic acids/alkalis as a medium, ECMM uses a neutral saline solution [ 2 ].…”

Experimental and analytical investigations into wire electrochemical micro turning

“…Over the years, different variants and hybridizations of this process have been developed by an ever-growing spectrum of the areas of applications. 1 Hybridizations, such as laser-assisted jet ECM, 2,3 electrochemical (EC) spark machining, 4 EC grinding, and so on, involve the amalgamation of two separate modes of material removal to form a novel technique having significant advantages over their parent techniques. Variants include processes, such as ECT, EC milling, EC polishing/ finishing, 5 jet ECM, 6 and so on, where the relative motion between the tool and workpiece is manipulated in order to impart the desired shape to the workpiece.…”