Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology 2015
DOI: 10.1016/b978-0-323-32737-4.00012-8
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Recent Advancements in EMM for Micro and Nanofabrication

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Cited by 3 publications
(1 citation statement)
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“…The electrolyte can be conveniently supplied to the machining zone without needing complex electrolyte supply system. The potential candidate materials for wire of wire-ECM process are tungsten, copper and platinum [72]. The accuracy in wire-ECM depends mainly on machining gap which depends on feed rate of wire, pulse voltage and pulse on-time [71].…”
Section: Wire Micro-ecmmentioning
confidence: 99%
“…The electrolyte can be conveniently supplied to the machining zone without needing complex electrolyte supply system. The potential candidate materials for wire of wire-ECM process are tungsten, copper and platinum [72]. The accuracy in wire-ECM depends mainly on machining gap which depends on feed rate of wire, pulse voltage and pulse on-time [71].…”
Section: Wire Micro-ecmmentioning
confidence: 99%