Surface acoustic wave pressure sensor and its matched antenna design

Li, Yuanyuan; Shao, Meng; Jiang, Bei; Cao, Le

doi:10.1177/0020294019857744

Cited by 12 publications

(7 citation statements)

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“…Modal is an inherent characteristic of SAW devices, and the author performed modal analysis by adding “eigenfrequency” studies based on the above parameters. The simulation results of SAW are divided into symmetric mode (a) and anti-symmetric mode (b) [ 13 ], as shown in Figure 3 .…”

Section: Resultsmentioning

confidence: 99%

Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices

et al. 2022

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In order to further improve the degree of frequency response of the surface acoustic wave (SAW) sensor for gas detection, the structure of the forked-finger transducer was analyzed, and its optimal structural parameters were simulated and designed. The simulation model of the unidirectional fork-finger transducer is established by using COMSOL finite element software. The thickness of the piezoelectric substrate, the electrode structure and material, and the thickness of the coating film are optimized and simulated. The results show that: the optimal thickness of the piezoelectric substrate is 3λ. The optimal thickness ratio and the lay-up ratio of the forked-finger electrode are 0.02 and 0.5, respectively. The Al electrode is more suitable as the a forked-finger electrode material compared to Cu, Au and Pt materials. Under the same conditions, the metal oxide-sensitive film (ZnO and TiO2) has a higher frequency response than the polymer-sensitive film (polyisobutylene and polystyrene), and the best sensitive film thickness range is 0.5~1 μm.

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Section: Resultsmentioning

confidence: 99%

Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices

et al. 2022

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“…According its working principle, an SAW can be seen as the superimposed effect of multiple pairs of IDT excitation signals. As the calculation process of multiple IDT superpositions is too complicated, the IDT model can be simplified according to the periodic conditions [24]. Both input and output IDT are simplified to a periodic structure of two pairs of electrodes.…”

Section: Simulation Methodology and Modellingmentioning

confidence: 99%

“…where v s is the SH-SAW velocity and f 0 is the SH-SAW eigenfrequency [24]. The eigenfrequency f 0 of the sensor is set at 395 MHz.…”

Section: Simulation Methodology and Modellingmentioning

confidence: 99%

Finite element simulation for sensitivity measurement of a shear horizontal surface acoustic wave micro pressure sensor with a groove structure

Yang

Jiang

et al. 2020

Meas. Sci. Technol.

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Shear horizontal surface acoustic wave (SH-SAW) sensors have great application potential due to their advantages of easy integration, miniaturization and suitability in liquid environments. In this paper, the finite element method is used to analyse a new SH-SAW micro pressure sensor, in which there are many groove structures along the direction of wave propagation on the delay path. We use the transient response simulation method to calculate and analyse the output voltage signal at the output interdigital transducer and surface average stress at the delay path of this new SH-SAW sensor, and its pressure sensitivity is analysed by uniformly applying an appropriate surface pressure on the resonant beam formed after grooving. The simulation results show that the surface average stress can be enhanced in a certain range of groove depth during the vibration of the groove structure. When the groove depth and width are set to 0.7 μm and 0.5 μm, respectively, the sensitivity of the SH-SAW sensor with a groove structure is four times higher than that of the traditional SH-SAW sensor. The increase of pressure sensitivity is the result of the increase of average stress caused by the groove structure. The new groove structure SH-SAW sensor provides a new basis for research on high-sensitivity micro-pressure sensors and lays a foundation for subsequent device design and manufacture.

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“…Small changes in the density of the matter on the path of th changes in the propagation-surface conditions, making the magni quency of the output signal different as compared to the input signa property of the SAW elements is widely used for a variety of sensor on the type and degree of change of the SAW parameters, the degre stimulus can be estimated, causing a change in the surface conditions direct uses of SAW sensors is the detection of pressure change, as it re tric effect, so there is no need for additional sensing coating [10][11][12][13]. SAW serves as an accelerometer or gyroscope [14,15].…”

Section: Introductionmentioning

confidence: 99%

“…Based on the type and degree of change of the SAW parameters, the degree of variation of the stimulus can be estimated, causing a change in the surface conditions. One of the possible direct uses of SAW sensors is the detection of pressure change, as it relies on the piezoelectric effect, so there is no need for additional sensing coating [10][11][12][13]. It is possible that the SAW serves as an accelerometer or gyroscope [14,15].…”

Section: Introductionmentioning

confidence: 99%

Recent Progress in the Topologies of the Surface Acoustic Wave Sensors and the Corresponding Electronic Processing Circuits

Aleksandrova

Badarov

2022

Sensors

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In this paper, we present an overview of the latest achievements in surface acoustic wave (SAW) sensors for gas or liquid fluid, with a focus on the electrodes’ topology and signal processing, as related to the application of the sensing device. Although the progress in this field is mainly due to advances in the materials science and the sensing coatings, the interdigital (IDT) electrodes’ organization is also an important tool for setting the acoustic-wave-distribution mode, and, thus, for improvement of the SAW performance. The signal-conditioning system is of practical interest, as the implementation of the SAW, as a compact and mobile system is dependent on this electronic circuit. The precision of the detection of the SAW platform is related not only to the IDT electrodes’ geometry but also to their location around the sensing layer. The most commonly used architectures are shown in the present paper. Finally, we identify the needs for the future improvement of these prospective sensors.

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Surface acoustic wave pressure sensor and its matched antenna design

Cited by 12 publications

References 12 publications

Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices

Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices

Finite element simulation for sensitivity measurement of a shear horizontal surface acoustic wave micro pressure sensor with a groove structure

Recent Progress in the Topologies of the Surface Acoustic Wave Sensors and the Corresponding Electronic Processing Circuits

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