2022
DOI: 10.3390/s22134917
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Recent Progress in the Topologies of the Surface Acoustic Wave Sensors and the Corresponding Electronic Processing Circuits

Abstract: In this paper, we present an overview of the latest achievements in surface acoustic wave (SAW) sensors for gas or liquid fluid, with a focus on the electrodes’ topology and signal processing, as related to the application of the sensing device. Although the progress in this field is mainly due to advances in the materials science and the sensing coatings, the interdigital (IDT) electrodes’ organization is also an important tool for setting the acoustic-wave-distribution mode, and, thus, for improvement of the… Show more

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Cited by 6 publications
(5 citation statements)
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“…Moreover, other design considerations when selecting acoustic wave sensors include oscillator stability and noise level [ 57 ]. These sensors are capable of identifying and detecting substances at ppb levels of concentration [ 58 ]. The piezoelectric transducer characteristics, the center frequency, the sensor layer characteristics (such as material qualities, thickness, and surface roughness), and the operating temperature all affect sensitivity, which can be measured in Hz/ppm or Hz/% [ 59 ].…”
Section: Design Of Various Types Of Acoustic Sensorsmentioning
confidence: 99%
See 1 more Smart Citation
“…Moreover, other design considerations when selecting acoustic wave sensors include oscillator stability and noise level [ 57 ]. These sensors are capable of identifying and detecting substances at ppb levels of concentration [ 58 ]. The piezoelectric transducer characteristics, the center frequency, the sensor layer characteristics (such as material qualities, thickness, and surface roughness), and the operating temperature all affect sensitivity, which can be measured in Hz/ppm or Hz/% [ 59 ].…”
Section: Design Of Various Types Of Acoustic Sensorsmentioning
confidence: 99%
“…( b ) The sensation layer and reference layer complete SAW system. ( c ) The potential obtained spectrum from using different acoustic frequencies [ 54 , 58 , 62 ] (copyright permission no: 6895891235874).…”
Section: Figurementioning
confidence: 99%
“…Рідинні мікросистеми загалом, і акустофлюїдні лаб-чипи зокрема, є мультидисциплінарними пристроями, для яких проєктування, виготовлення та застосування потребує знань з механіки твердого тіла та рідини, технології мікроелектроніки, хімії, біології та інших областей. Детальний огляд сучасних наукових публікацій щодо проблем застосування ПАХ в мікрофлюїдних лаб-чипах проведено в статтях [3,4]. Більшість публікацій присвячені використанню ПАХ для різних біомедичних застосувань а саме: поділ клітин, виявлення вірусів, бактеріальні біоплівки, моніторинг стовбурових клітин сухожиль, аналіз ДНК тощо.…”
Section: огляд сучасних джерел інформації за тематикою публікаціїunclassified
“…Acoustic wave-based piezoelectric sensors have emerged over the decades in multiple disciplines as an ideal candidate for structural health monitoring (SHM) methods because of their adjustable frequency range, easy processability, and wireless capability [1][2][3][4] . Evaluation of strain concentrations during the additive manufacturing process demands a micro-sized sensor that can detect meaningful information wirelessly to ensure quality.…”
Section: Introductionmentioning
confidence: 99%