Surface Acoustic Wave Devices for Sensor Applications

Scholl, Gerd; Schmidt, F.; Wolff, U.

doi:10.1002/1521-396x(200105)185:1<47::aid-pssa47>3.0.co;2-q

Cited by 20 publications

(6 citation statements)

References 9 publications

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“…A chemically sensitive film on top of the functional layer realizes the selectivity of the sensor to specific gases. Well-established examples for resonant gas sensors are the quartz microbalance [594]and SAW based sensors [595,596].…”

Section: Resonant Devicesmentioning

confidence: 99%

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

Cimalla¹,

Pezoldt²,

Ambacher³

2007

J. Phys. D: Appl. Phys.

346

217

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With the increasing requirements for microelectromechanical systems (MEMS) regarding stability, miniaturization and integration, novel materials such as wide band gap semiconductors are attracting more attention. Polycrystalline SiC has first been implemented into Si micromachining techniques, mainly as etch stop and protective layers. However, the outstanding properties of wide band gap semiconductors offer many more possibilities for the implementation of new functionalities. Now, a variety of technologies for SiC and group III nitrides exist to fabricate fully wide band gap semiconductor based MEMS. In this paper we first review the basic technology (deposition and etching) for group III nitrides and SiC with a special focus on the fabrication of three-dimensional microstructures relevant for MEMS. The basic operation principle for MEMS with wide band gap semiconductors is described. Finally, the first applications of SiC based MEMS are demonstrated, and innovative MEMS and NEMS devices are reviewed.

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Section: Resonant Devicesmentioning

confidence: 99%

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

Cimalla¹,

Pezoldt²,

Ambacher³

2007

J. Phys. D: Appl. Phys.

346

217

View full text Add to dashboard Cite

show abstract

“…Biosensors are used in a broad range of applications such as clinical diagnosis [1], biomedical devices [2,3,4], food production and analysis [5,6], microbiology [7,8], pharmaceutical and drug analysis [9,10], pollution control and monitoring [11], and military applications [12,13]. Surface acoustic wave (SAW)-based biosensors have played an important role in bio-detection due to their advantage of low-cost, portability, rapid detection rate, high sensitivity, analyte selectivity, and stability [3].…”

Section: Introductionmentioning

confidence: 99%

Perturbation Analysis of a Multiple Layer Guided Love Wave Sensor in a Viscoelastic Environment

Wang

Murphy

Wang

et al. 2019

Sensors

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Surface acoustic wave sensors have the advantage of fast response, low-cost, and wireless interfacing capability and they have been used in the medical analysis, material characterization, and other application fields that immerse the device under a liquid environment. The theoretical analysis of the single guided layer shear horizontal acoustic wave based on the perturbation theory has seen developments that span the past 20 years. However, multiple guided layer systems under a liquid environment have not been thoroughly analyzed by existing theoretical models. A dispersion equation previously derived from a system of three rigidly coupled elastic mass layers is extended and developed in this study with multiple guided layers to analyze how the liquid layer’s properties affect the device’s sensitivity. The combination of the multiple layers to optimize the sensitivity of an acoustic wave sensor is investigated in this study. The Maxwell model of viscoelasticity is applied to represent the liquid layer. A thorough analysis of the complex velocity due to the variations of the liquid layer’s properties and thickness is derived and discussed to optimize multilayer Surface acoustic wave (SAW) sensor design. Numerical simulation of the sensitivity with a liquid layer on top of two guided layers is investigated in this study as well. The parametric investigation was conducted by varying the thicknesses for the liquid layer and the guided layers. The effect of the liquid layer viscosity on the sensitivity of the design is also presented in this study. The two guided layer device can achieve higher sensitivity than the single guided layer counterpart in a liquid environment by optimizing the second guided layer thickness. This perturbation analysis is valuable for Love wave sensor optimization to detect the liquid biological samples and analytes.

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“…To overcome the disadvantages of the current SAW pressure sensor, a reflective delay line patterned with an interdigital transducer (IDT) and several reflectors on a piezoelectric substrate was presented as the pressure sensor element [4][5][6]. This device shows some unique advantages over other currently available devices: (1) it is small, light and has a simple measurement system, owing to its one-chip architecture; (2) it is possible to compensate temperature effect; and (3) during the sensitivity evaluation, phase shifts provide it with a much higher resolution.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity Improvement of Wireless Pressure Sensor by Incorporating a Saw Reflective Delay Line

Wang

Lee

et al. 2008

International Journal on Smart Sensing and Intelligent Systems

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Surface Acoustic Wave Devices for Sensor Applications

Cited by 20 publications

References 9 publications

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

Perturbation Analysis of a Multiple Layer Guided Love Wave Sensor in a Viscoelastic Environment

Sensitivity Improvement of Wireless Pressure Sensor by Incorporating a Saw Reflective Delay Line

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