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In this paper, we present a novel microelectromechanical system-interdigital transducer (MEMS-IDT) surface acoustic wave (SAW) gyroscope with an 80 MHz central frequency on a 128 Y X LiNbO 3 wafer. The developed MEMS-IDT gyroscope is composed of a two-port SAW resonator, a dual delay line oscillator, and metallic dots. The SAW resonator provides a stable standing wave, and the vibrating metallic dot at an antinode of the standing wave induces the second SAW in the normal direction of its vibrating axis. The dual delay line oscillator detects the Coriolis force by comparing the resonant frequencies between two oscillators through the interference effect. The coupling of mode (COM) modeling was used to extract the optimal design parameters prior to fabrication. In the electrical testing by the network analyzer, the fabricated SAW resonator and delay lines showed low insertion loss and similar operation frequencies between a resonator and delay lines. When the device was rotated, the resonant frequency differences between two oscillators linearly varied owing to the Coriolis force. The obtained sensitivity was approximately 119 Hz deg À1 s À1 in the angular rate range of 0-1000 deg/s. Satisfactory linearity and superior directivity were also observed in the test.

A surface acoustic wave (SAW)-based gyroscope with an 80 MHz central frequency was developed on two different piezoelectric substrates (128° YX LiNbO3 and ST-X quartz). A sensor was developed that contained two SAW oscillators. One oscillator was used as the sensing element and had metallic dots in the cavity between the input and output interdigital transducers (IDTs). The other oscillator was used as a reference element. Two oscillators were formed to extract the Coriolis effect by comparing the oscillation frequencies between these two delay lines, and metallic dots were used to induce a Coriolis force. Three different IDT structures were used to obtain a stable progressive SAW. Coupling of modes modeling was conducted prior to fabrication for determining the optimal device parameters. The device was fabricated and then measured on a rate table in accordance with the results of simulation. When the device was subjected to an angular rotation, the oscillation frequencies of the two oscillators were observed to differ. Depending on the angular velocity, the frequency difference was linearly modulated. The obtained sensitivity was approximately 62.57 Hz deg−1 s−1 at angular rates in the range 0–1000 deg s−1 in the case of the LiNbO3 substrate and single-phase unidirectional transducer and combed electrode structure. The dependence of the device performance on the piezoelectric substrate, IDT structure, and temperatures was also characterized. The developed device has good resistance to mechanical shock and stability to temperature.

A strain measurement system based on a shear horizontal surface acoustic wave (SH SAW) was developed. The developed system is composed of a SAW microsensor, a printed circuit board (PCB), an adhesive and a strain gauge. When a compression force is applied to the PCB by the strain gauge, the PCB is bent so that external strain energy can be evenly delivered to the microsensor without any detachment of the sensor from the board. When a stretching force is applied to the PCB under the condition that one side of the PCB is fixed and the other side is modulated, the actual length of the SAW delay line between the two interdigital transducers (IDTs) is increased. The increase in the delay line length causes a change in the time for the propagating SAW to reach the output IDT. If strain energy is applied to the piezoelectric substrate, the substrate density is changed, which then changes the propagation velocity of the SAW. Coupling-of-modes modeling was conducted prior to fabrication to determine the optimal device parameters. Depending on the strain, the frequency difference was linearly modulated. The obtained sensitivity for stretching was 17.3 kHz/% for the SH wave mode and split electrode. And the obtained sensitivity for bending was 46.1 kHz/% for the SH wave mode and split electrode. The SH wave showed about 15% higher sensitivity than the Rayleigh wave, and the dog-bone PCB showed about 8% higher sensitivity than the rectangular PCB. The obtained sensitivity was about five times higher than that of existing SAW-based strain sensors.

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This paper presents a novel wireless Love-wave-based biosensor using a polymethyl methacrylate (PMMA) waveguide and protein A receptor layers on a 41 • YX LiNbO 3 piezoelectric substrate for immunoglobulin G (IgG) detection. A 440 MHz reflective delay line composed of single-phase unidirectional transducers (SPUDTs) and three shorted grating reflectors was fabricated as the sensor element. A theoretical modeling was performed to describe the wave propagation of Love wave devices on a 41 • YX LiNbO 3 piezoelectric substrate with large piezoelectricity. The fabricated devices were wirelessly characterized by using the network analyzer as the reader unit. The resultant reflection peaks showed large signal/noise ratio, sharp peaks, and few spurious signals. The binding of the IgG to the protein A receptor layer induced large phase shifts of the reflection peaks due to the mass loading effect. Good linearity, reproducibility, and high sensitivity were observed in the IgG concentration range 1-65 nM. Unique advantages such as high sensitivity and a simple wireless measurement method over other currently available biosensors are also presented.

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