Suppression of transverse mode responses for ultra-wideband and low-loss SAW filters on a Cu-grating/15&amp;amp;#x00B0;YX-LiNbO/sub 3/ structure

Omori, Tatsuya; Yokoyama, N.; Matsuda, Kenji; Hashimoto, Ken–ya; Yamaguchi, M.

doi:10.1109/ultsym.2005.1603032

Cited by 4 publications

(1 citation statement)

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“…electron beam photolithography) which have successfully achieved miniaturized and integral versions of low loss, highly selective band pass filters covering a wide range of frequencies (from 20 kHz to 90 GHz) [12] and extremely wideband RF SAW filters [13].…”

Section: Future Trend Of Saw Filtermentioning

confidence: 99%

Integration of SAW filters

Hdiji¹,

Mnif²,

Loulou³

2008

2008 IEEE International Conference on Integrated Circuit Design and Technology and Tutorial

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Advances in Micromachining technology can facilitate the integration of SAW (Surface Acoustic Wave) devices and CMOS circuitry on IC scale substrate for Monolithic fabrication. The optimal design and performance of these filters can be reached by using new Smart materials. The key component in the structure of the SAW device is the piezoelectric materials used which depends mainly on some important properties such as, high acoustic velocities, power durability and temperature stability. Simulation results are presented for different design of SAW filter and different piezoelectric substrates. Index Terms -Micromachining, Monolithic IC, Smart materials, SAW.

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Section: Future Trend Of Saw Filtermentioning

confidence: 99%