Study of Electrode Configuration for Downsizing of SAW Resonators on Low-Cut Lithium Niobate

Shi, Bin; Wu, Zhaohui; Li, Wuping; Wu, Xianping; Bao, Jingfu; Hashimoto, Ken-ya

doi:10.1109/ius54386.2022.9957631

Cited by 2 publications

(2 citation statements)

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“…Further miniaturization is one of the hottest research topics in surface acoustic wave (SAW) devices, especially those for use in LTE low bands (<1 GHz). [1][2][3][4][5] For this purpose, Mimura, et al, investigated 2,3) the reduction of the Rayleigh SAW velocity using Al/Pt electrodes embedded in the SiO 2 /128°YX-LiNbO 3 (LN) structure known as TC SAW. 6,7) Nakagawa, et al, demonstrated 4) reduction of SH SAW velocity using Al/Pt electrodes on the 50°YX-LiTaO 3 (LT)/SiO 2 /Si structure known as the incredible high performance (I.H.P.)…”

Section: Introductionmentioning

confidence: 99%

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SAW velocity reduction and spurious modes suppression on the layer structure

Hu,

Wu,

et al. 2024

Jpn. J. Appl. Phys.

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This paper discusses use of the layered structure for the SAW velocity reduction. First, it is shown that insertion of SiO2 is crucial between the piezoelectric layer and the base substrate to keep large electromechanical coupling factor even when the SAW velocity is reduced. It is also shown that use of high velocity substrate such as Si is also crucial for bringing spurious resonances much higher than the main resonance. Impact of Si orientation is also discussed. Next, suppression of transverse mode resonances and lateral leakage is studied. It is shown that the double busbar structure offers Q enhancement through good lateral energy confinement, and its combination with the piston design also gives good transverse mode suppression. Furthermore, discussions are extended to a strong spurious resonance appears near the anti-resonance.

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Section: Introductionmentioning

confidence: 99%

“…SAW. [8][9][10][11][12] The authors investigated 5) the electrode configuration preferable for the use with the SH SAW on the low-cut LN substrate. 13) It was shown that although heavy and stiff W is most preferable as the electrode material for significant SAW velocity reduction, Mo and Pt are also preferable.…”

Section: Introductionmentioning

confidence: 99%