SAW velocity reduction and spurious modes suppression on the layer structure
Richeng Hu,
Zhaohui Wu,
Xinzhi Li
et al.
Abstract:This paper discusses use of the layered structure for the SAW velocity reduction. First, it is shown that insertion of SiO2 is crucial between the piezoelectric layer and the base substrate to keep large electromechanical coupling factor even when the SAW velocity is reduced. It is also shown that use of high velocity substrate such as Si is also crucial for bringing spurious resonances much higher than the main resonance. Impact of Si orientation is also discussed. Next, suppression of transverse mode resonan… Show more
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