2016
DOI: 10.7567/apex.9.061003
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Superior transport properties of InGaN channel heterostructure with high channel electron mobility

Abstract: A high-quality AlGaN/InGaN heterostructure is grown by pulsed metal organic chemical vapor deposition on a sapphire substrate. A two-step AlN interlayer is adopted to improve the interface morphology and protect the high-quality InGaN channel. Temperature-dependent Hall measurement shows superior transport properties compared with the traditional GaN channel heterostructure at elevated temperatures. Further, a record highest channel electron mobility of 1681 cm2/(V·s) at room temperature for an InGaN channel h… Show more

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Cited by 13 publications
(10 citation statements)
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“…InGaN compound has been widely used as the channel material due to their lower band gap, which can enhance the high frequency characteristics and to prevent current collapse (Lenka et al, 2013;Zhang et al, 2016;Zhang et al, 2015). In this part, the structure design is improved, where the GaN channel is replaced to InGaN compound.…”
Section: Device Channel Layermentioning
confidence: 99%
“…InGaN compound has been widely used as the channel material due to their lower band gap, which can enhance the high frequency characteristics and to prevent current collapse (Lenka et al, 2013;Zhang et al, 2016;Zhang et al, 2015). In this part, the structure design is improved, where the GaN channel is replaced to InGaN compound.…”
Section: Device Channel Layermentioning
confidence: 99%
“…Due to the superb high-frequency characteristic and highbreakdown voltage, GaN-based high-electron-mobility transistors (HEMTs) have become the most promising candidates for power microwave devices. [1][2][3][4][5][6][7] Conducting current through 2D electron gas (2DEG) localized at the AlGaN/GaN heterojunction interface gives the GaN-based HEMTs a low on-resistance and excellent high-frequency characteristics. To date, further improvement of the high-frequency performance of the devices to meet the requirements of the high-frequency communication field has become the focus of research.…”
Section: Introductionmentioning
confidence: 99%
“…Ronghua Wang et al fabricated a depletion‐mode HEMT with 11 nm quaternary In 0.13 Al 0.83 Ga 0.04 N barrier and 5 nm In 0.05 Ga 0.95 N channel on SiC substates and featured a record high fT·fnormalmax of 239 GHz for InGaN channel HEMTs. Zhang et al adopted a two‐step AlN interlayer in AlGaN/InGaN heterostructures to improve the quality of the interface between barrier and buffer, and obtained a record highest channel electron mobility of 1681 cm 2 V · s −1 .…”
Section: Introductionmentioning
confidence: 99%