2020
DOI: 10.35848/1347-4065/ab7610
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Superhydrophobic property enhancement on guard ring micro-patterned PDMS with simple flame treatment

Abstract: In this study, a simple flame treatment was conducted to improve hydrophobicity of PDMS surfaces with a square guard ring (SGR) structure. In a scratch test, it was found that a surface with a pattern of circular rings and eight stripe supporters (C-RESS) (width: 2.0 μm, height: 5.0 μm) with the SGR structure (width: 20 μm, height: 100 μm) had the highest durability and no collapsing structures were found. After the surface with the pattern of the C-RESS with the SGR structure was simple flame-treated at 700 °… Show more

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Cited by 10 publications
(16 citation statements)
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“…These patterns were arranged in a square array. Si master molds of both the PIL and C-RESS micro-structure were fabricated by a conventional photolithography and deep reactive ion etching (DRIE) process [ 34 , 36 ]. In this experiment, the resolution of the lithographic exposure tool called Nikon stepper, model NSR2005i8A (Miyagi Nikon Precision Co., Ltd., Miyaki, Japan) is 0.5 µm.…”
Section: Methodsmentioning
confidence: 99%
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“…These patterns were arranged in a square array. Si master molds of both the PIL and C-RESS micro-structure were fabricated by a conventional photolithography and deep reactive ion etching (DRIE) process [ 34 , 36 ]. In this experiment, the resolution of the lithographic exposure tool called Nikon stepper, model NSR2005i8A (Miyagi Nikon Precision Co., Ltd., Miyaki, Japan) is 0.5 µm.…”
Section: Methodsmentioning
confidence: 99%
“…This prevents getting mold damage from hard PDMS residues in a poor demolding process. The HMDS molecules form a self-assembled monolayer (SAM) onto the Si surface of which the non-polar methyl groups repel water droplets inducing a slight hydrophobicity onto the Si surface (WCA: 60°–80°) with correspondingly good PDMS mold release properties [ 34 , 36 ]. Subsequently, the PDMS mixture (Sylgard 184, curing agent: 10 wt%, Sigma-Aldrich, St. Louis, MO, USA) was poured onto the Si master molds containing either the PIL or C-RESS pattern [ 34 , 36 ].…”
Section: Methodsmentioning
confidence: 99%
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