Submicrometer-MOS capacitor with ultra high capacitance biased by Au nanoelectrodes

Kisner, Alexandre; Aguiar, M. R.; Vaz, A. F.; Rojas, Adriana A.; Cavarsan, F. A.; Diniz, J. A.; Kubota, Lauro T.

doi:10.1007/s00339-008-4860-0

Cited by 5 publications

(1 citation statement)

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“…Moreover, the Al spiral also acts as the coil for the inductive sensing unit. This study exploits np-AAO as a superior dielectric material [14][15]. In general, the np-AAO film usually has been exploited to act as a template or mask for nano-technology applications, such as nanowires synthesis and nano-structures [16][17].…”

Section: Concept and Designmentioning

confidence: 99%

Development of a proximity sensor with vertically monolithic integrated inductive and capacitive sensing units

Tseng

Wang

et al. 2013

J. Micromech. Microeng.

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This study designs and implements a proximity sensor consisting of inductive and capacitive sensing units. These two sensing units are vertically monolithic integrated on a single chip using the micro-fabrication processes. In addition, low-temperature fabricated nanoporous anodic aluminum oxide (np-AAO) is employed as the dielectric layer to enhance the performance of capacitive sensing. The characteristics of the presented vertically monolithic integrated inductive and capacitive proximity sensor are as follows: (1) enlarged sensing distance of conductive objectives: capacitive sensing unit for short distance detection and inductive sensing unit for long distance detection, (2) non-conductive object can be detected by the capacitive sensing unit, (3) fringe effect capacitive sensing is enhanced by the spiral coil electrode and (4) np-AAO has good dielectric properties (the dielectric constant is 11.9 in this study) for capacitive sensing. In application, various materials (including metal, plastic and a human finger) have been successfully detected by the presented sensor. Preliminary results demonstrate that the typical fabricated proximity sensor has a sensing range of 0.5–5 mm for the metal rod. In comparison, the inductive and capacitive sensing units have the sensing ranges of 1.5–5 and 0.5–3 mm, respectively. Moreover, the non-conductive plastic rod can be detected by the capacitive sensing unit.

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