Sub-micron surface patterning by laser irradiation through microlens arrays

Lim, Chin Seong; Hong, Minghui; Lin, Yu‐Sheng; Chen, G.X.; Kumar, A. Senthil; Rahman, Mustafizur; Tan, Leng Seow; Fuh, Jerry Ying Hsi; Lim, Gwon

doi:10.1016/j.jmatprotec.2007.04.088

Cited by 26 publications

(16 citation statements)

References 20 publications

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“…By proper selection of micro-lens sag height with respect to the diameter, the spot size of the beamlets can be tuned. The ability of MLA to split a single input laser beam to produce thousands to millions beamlets is in particularly useful and important in surface nanopatterning application as being demonstrated in our previous works [19,20].…”

Section: Resultsmentioning

confidence: 98%

Study of field intensity distribution of laser beam propagating through a micro-lens array

et al. 2012

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The propagation of a laser beam through a microlens array (MLA) was simulated using Finite Time Difference Domain (FDTD) method. The intensity distribution at different output planes away from the micro-lens array surface was investigated. As compared to the focal plane, the intensity distribution observed at those out-of-focus planes varies, which is attributed to the interference and diffraction of output laser beams. The simulated results were counter checked by placing a physical MLA under an illumination of a 488 nm continuous wave Argon Ion laser and images were captured for different output planes. Both simulation and experimental results show a great similarity in terms of the distribution patterns. By changing the lens sag height with respect to the lens diameter, the full width at half maximum (FWHM) of the focused laser spot and its corresponding maximum energy flux were analyzed. A FWHM of 160 nm can be achieved by proper selection of lens sag height. It is also found that the energy flux is proportional to numerical aperture (NA).

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Section: Resultsmentioning

confidence: 98%

Study of field intensity distribution of laser beam propagating through a micro-lens array

et al. 2012

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“…This lithography technique can flexibly generate arbitrary patterns at a high speed over a large area. The distribution of the micro/nanostructures follows the distribution of the MLA geometry [18]. The feature size of the micro/nanostructures can be controlled by the exposure time and moving speed of nano-stage.…”

Section: Laser Microlens Array (Mla) Lithography and Laser Interferenmentioning

confidence: 98%

Laser microprocessing and nanoengineering of large-area functional micro/nanostructures

et al. 2011

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Laser microprocessing and nanoengineering are of great interest to both scientists and engineers, since the inspired properties of functional micro/nanostructures over large areas can lead to numerous unique applications. Currently laser processing systems combined with high speed automation ensure the focused laser beam to process various materials at a high throughput and a high accuracy over large working areas. UV lasers are widely used in both laser microprocessing and nanoengineering. However by improving the processing methods, green pulsed laser is capable of replacing UV lasers to make high aspect ratio micro-grooves on fragile and transparent sapphire substrates. Laser micro-texturing can also tune the wetting property of metal surfaces from hydrophilic to super-hydrophobic at a contact angle of 161° without chemical coating. Laser microlens array (MLA) can split a laser beam into multiple laser beams and reduce the laser spot size down to sub-microns. It can be applied to fabricate split ring resonator (SRR) meta-materials for THz sensing, surface plasmonic resonance (SPR) structures for NIR and molding tools for soft lithography. Furthermore, laser interference lithography combined with thermal annealing can obtain a large area of sub-50nm nano-dot clusters used for SPR applications.

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“…Gaussian beams tightly focused produce a steep spatial intensity (fluence) distribution which precisely determines the diameter within which the fluence is above the threshold of the material. So the intended diameter of a hole can be achieved by using proper laser fluence and few hundreds nanometers holes can be directly drilled in thin films [87,88].…”

Section: Direct Writing Microstructures In Surfacesmentioning

confidence: 99%