IEEE International Electron Devices Meeting 2003
DOI: 10.1109/iedm.2003.1269446
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Sub-10-nm planar-bulk-CMOS devices using lateral junction control

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Cited by 62 publications
(47 citation statements)
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“…The oxide thickness is fixed at 1 nm for all structures [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. Fig.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The oxide thickness is fixed at 1 nm for all structures [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Compared with the single-gate (SG) SOI, these structures suppress short channel effects (SCEs), and have high transconductance and ideal subthreshold swing. They have a superior ability in channel control, so the drain induced channel barrier height lowing (DIBL), threshold voltage (V th ) roll off, and off state leakage is greatly suppressed [1][2][3][4][5][6][7]. The structure can be subject to further optimization to sustain more structural benefit.…”
Section: Introductionmentioning
confidence: 99%
“…This decreasing scale allows in principle to include more transistors on a chip thereby enabling larger, faster, cheaper circuits to be built -widely captured through Moore's law [2]. However, it is now accepted that previous assumptions on the uniformity of transistor devices no longer hold true [3][4][5][6][7]. The atomic dimensions of transistor devices introduce variability caused by the microscopic (atomistic) differences of the transistors including for example the number and positioning of dopants in the silicon.…”
Section: Introductionmentioning
confidence: 99%
“…The device whose gate length is below 50nm begins to appear in a market, and the operation of 5nm gate length device was presented in IEDM 2003 [1]. However, it will be very difficult to maintain the performance enhancement by scaling as it has been in the past.…”
Section: Introductionmentioning
confidence: 99%