Sub‐10 nm High‐Aspect‐Ratio Patterning of ZnO Using an Electron Beam

Abstract

An electron‐beam‐sensitive zinc naphthenate resist is used to pattern ZnO. Features as small as 7 nm and with an aspect ratio of ∼ 9 can be patterned. Size reduction to ∼ 5 nm is observed when these patterns are heat treated to give crystalline ZnO (see Figure). The functionality of ZnO is confirmed via photoluminescence studies.

Pushing the boundaries of local oxidation nanolithography: Short timescales and high speeds

“…This is already promising due to the small lateral sizes of the nanostructures, which when patterned in arrays of 15 Â 15 nm 2 data bits, would lead to a storage density exceeding 1 Tbit/in 2 . Furthermore, nanostructure sizes achieved here are comparable to the highest resolutions demonstrated by other fabrication techniques, for example 5-10 nm with electron beam lithography [16] and less than 25 nm for nano-imprint lithography [17], whilst superior to more conventional UV photolithography. At present, however, short-timescale local oxidation by AFM is not suitable for large-scale device fabrication due to the lack of uniformity of the oxide structures.…”

One-dimensional ZnO nanostructures: Solution growth and functional properties

“…(c) A 30° tilted view of the horizontal nanowire-array-based five-segment monolithic superstructures [56]. Reproduced with permission An electron beam could also be used to directly generate ZnO nanowires by writing on a zinc naphthenate resist [287]. The resist became insoluble in toluene after exposure to a high energy electron beam, giving rise to negative patterns.…”

“…The resist became insoluble in toluene after exposure to a high energy electron beam, giving rise to negative patterns. The as-fabricated polycrystalline ZnO nanowires could be reduced to sub-10 nm dimensions after calcination [287].…”

Fabrication of UV-blocking nanohybrid coating via miniemulsion polymerization

“…NanoZnO, as an important inorganic material, exhibits low dielectric constant, large electromechanical coupling coefficient, high luminous transmittance, high catalysis activity, intensive ultraviolet and infrared absorption, etc. Therefore, nano-ZnO can potentially be applied to catalysts, gas sensors, semiconductors, varistors, piezoelectric devices, field-emission displays, and UV-shielding materials [5][6][7][8][9][10][11]. However, designing and modifying fabrics by nano-ZnO for high protection against UV radiation (UV-R, both UVA and UVB, falls into the regions of 400-315 and 315-280 nm, respectively, of the solar spectra) is a relatively new application.…”