Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching

Zhou, Tianfeng; Xu, Ruzhen; Ruan, Benshuai; He, Yupeng; Liang, Zhiqiang; Wang, Xibin

doi:10.1016/j.jmatprotec.2019.116510

Cited by 12 publications

(7 citation statements)

References 29 publications

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“…By investigating the influences of various masks and solutions on the etching process, researchers have found ways to achieve deep etching and have produced cavities on the order of hundreds of microns. Chen et al and Tong et al produced both closely packed hexagonal and rectangular [37]. Reprinted from [37], Copyright (2020), with permission from Elsevier.…”

Section: Wet Etchingmentioning

confidence: 99%

“…Chen et al and Tong et al produced both closely packed hexagonal and rectangular [37]. Reprinted from [37], Copyright (2020), with permission from Elsevier.…”

Section: Wet Etchingmentioning

confidence: 99%

“…Greyscale lithography [34] and thermal scanning probe lithography [35] have been studied for the fabrication of 3D microstructures, such as microlenses, v-grooves, and pyramids. The direct production of microstructures on photoresist [36] and metal [37] masks via single-point diamond cutting has been proposed, and microlens structures have been successfully produced on Si via dry etching pattern transfer, as shown in figure 6. (a) Line-like grooves superimposed on a pre-machined microstructure by the two-beam interference method and (b) the cross-section profile of the grooves [42].…”

Section: Wet Etchingmentioning

confidence: 99%

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A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Zhou

Wang

et al. 2021

Int. J. Extrem. Manuf.

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Micro/nanostructured components play an important role in micro-optics and optical engineering, tribology and surface engineering, and biological and biomedical engineering, among other fields. Precision glass molding technology is the most efficient method of manufacturing micro/nanostructured glass components, the premise of which is meld manufacturing with complementary micro/nanostructures. Numerous mold manufacturing methods have been developed to fabricate extremely small and high-quality micro/nanostructures to satisfy the demands of functional micro/nanostructured glass components for various applications. Moreover, the service performance of the mold should also be carefully considered. This paper reviews a variety of technologies for manufacturing micro/nanostructured molds. The authors begin with an introduction of the extreme requirements of mold materials. The following section provides a detailed survey of the existing micro/nanostructured mold manufacturing techniques and their corresponding mold materials, including nonmechanical and mechanical methods. This paper concludes with a detailed discussion of the authors recent research on nickel-phosphorus (Ni-P) mold manufacturing and its service performance.

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Section: Wet Etchingmentioning

confidence: 99%

“…Chen et al and Tong et al produced both closely packed hexagonal and rectangular [37]. Reprinted from [37], Copyright (2020), with permission from Elsevier.…”

Section: Wet Etchingmentioning

confidence: 99%

Section: Wet Etchingmentioning

confidence: 99%

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A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Zhou

Wang

et al. 2021

Int. J. Extrem. Manuf.

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“…It is an important material for substrate and epitaxial in wafers. In addition, SiC also has a wide application prospect in the fields of optical mirrors and biomedical devices [ 4 , 5 ]. At present, more than 250 kinds of SiC polytypes have been found, of which 3C-SiC, 4H-SiC, and 6H-SiC are the most widely used.…”

Section: Introductionmentioning

confidence: 99%

Mechanical Load-Induced Atomic-Scale Deformation Evolution and Mechanism of SiC Polytypes Using Molecular Dynamics Simulation

et al. 2022

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Silicon carbide (SiC) is a promising semiconductor material for making high-performance power electronics with higher withstand voltage and lower loss. The development of cost-effective machining technology for fabricating SiC wafers requires a complete understanding of the deformation and removal mechanism. In this study, molecular dynamics (MD) simulations were carried out to investigate the origins of the differences in elastic–plastic deformation characteristics of the SiC polytypes, including 3C-SiC, 4H-SiC and 6H-SiC, during nanoindentation. The atomic structures, pair correlation function and dislocation distribution during nanoindentation were extracted and analyzed. The main factors that cause elastic–plastic deformation have been revealed. The simulation results show that the deformation mechanisms of SiC polytypes are all dominated by amorphous phase transformation and dislocation behaviors. Most of the amorphous atoms recovered after completed unload. Dislocation analysis shows that the dislocations of 3C-SiC are mainly perfect dislocations during loading, while the perfect dislocations in 4H-SiC and 6H-SiC are relatively few. In addition, 4H-SiC also formed two types of stacking faults.

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“…Although these methods can produce smaller microstructures, their complex procedures and harsh conditions have hindered their further development. Regarding large-area anisotropic wedge structures, machining technology has attracted great interest due to its high precision and high efficiency. − Tricinci et al faithfully reproduced the hierarchical shape of gecko setae via two-photon lithography and studied its effects in terms of its adhesion and friction performances . However, this process is very slow, and large-area preparation is not possible.…”

Section: Introductionmentioning

confidence: 99%

Gecko-Inspired Biomimetic Surfaces with Annular Wedge Structures Fabricated by Ultraprecision Machining and Replica Molding

et al. 2021

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The current research on gecko-inspired dry adhesives is focused on micropillar arrays with different terminal shapes, such as flat, spherical, mushroom, and spatula tips. The corresponding processing methods are mostly chemical methods, including lithography, etching, and deposition, which not only are complex, expensive, and environmentally unfriendly, but also cannot completely ensure microstructural integrity or performance stability. The present study demonstrates a high-precision, high-efficiency, and green method for the fabrication of a gecko-inspired surface, which can promote its application in dexterous robot hands and mechanical grippers. Based on the bendable lamellar structures of the gecko, annular wedge adhesive surfaces that stick to the finger surfaces of dexterous robot hands to improve their load capacity are proposed and fabricated via a suitable combined processing method of ultraprecision machining and replica molding. The greater the width, the higher the replication integrity, and when the minimum width is 20 μm, the replication error is less than 5.5% due to the superior processing performance of the nickel–phosphorus (Ni–P) plating of the master mold. The fabricated annular wedge structures with an optimized width of 20 μm not only exhibit a strong friction force of up to 35.48 mN under a preload of 20 mN in the GCr15/poly(dimethylsiloxane) (PDMS) friction pair but also demonstrate an obviously improved anisotropic friction characteristic of up to λ = 1.36, as the molecular force exhibits a stronger increase as compared to the decrease of the mechanical force of the structure with a small width.

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Study on new method and mechanism of microcutting-etching of microlens array on 6H-SiC mold by combining single point diamond turning with ion beam etching

Cited by 12 publications

References 29 publications

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Mechanical Load-Induced Atomic-Scale Deformation Evolution and Mechanism of SiC Polytypes Using Molecular Dynamics Simulation

Gecko-Inspired Biomimetic Surfaces with Annular Wedge Structures Fabricated by Ultraprecision Machining and Replica Molding

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