Study of Thickness Distributions of Sputtered Gold Particles Deposited on a Perpendicular Section for Enhancement of 3D MetA-SIMS

Akiba, Shouta; Yamazaki, Atsuko; Shirakura, Daichi; Tomiyasu, Bunbunoshin; Owari, Masanori

doi:10.1380/ejssnt.2016.87

Cited by 2 publications

(4 citation statements)

References 7 publications

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“…The intensity was lower http://www.sssj.org/ejssnt (J-Stage: http://www.jstage.jst.go.jp/browse/ejssnt/)gradually as the increase of the distance from the edge of Au plate. This distribution was not inconsistent with the simulation results [10].…”

Section: Resultssupporting

confidence: 80%

“…Then, for the purpose of a precise analysis of 3D MetA-SIMS, we simulated about the distribution of gold (Au), and then obtained a good accordance with experimental results by 3D laser micro scope observation [10]. In consequence, we could set the optimum condition of beam irradiation.…”

Section: Introductionmentioning

confidence: 70%

“…This simulation was developed under cosine's law (the angular distribution). The details are shown in the reference [10] (the title was "Study on thickness distributions of sputtered and deposited gold particles on a perpendicular section for enhancement of 3D MetA-SIMS"). Shave-off beam current was 1.2 nA.…”

Section: A Beam Conditionmentioning

confidence: 99%

See 2 more Smart Citations

Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS

Yamazaki

Akiba

Tomiyasu

et al. 2015

e-J. Surf. Sci. Nanotech.

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Three-dimensional microanalysis of the microstructure of organic materials is important in the development and progress of novel materials on the micro-to-nanometer scales. We have developed the three-dimensional microanalysis method using focused ion beams (FIBs) for section processing (shave-off scanning) and mapping for time-of-flight secondary ion mass spectrometry (ToF-SIMS). Shave-off scanning can effectively create an arbitrary section on a sample set against composite materials with a wide variety of shapes; three-dimensional sample images are then obtained by alternately operating two FIBs. From the simulation results, we could set the optimum condition of beam irradiation. In this study, we confirmed the enhancement of secondary ion intensity by Au deposition under ToF-SIMS mapping with the optimized condition, and examine the usefulness of the simulation. The enhanced maps of characteristic polystyrene (PS) fragment ions were obtained. In addition, we observed the distribution of Au deposition by mapping results. These maps showed same tendency. The intensity of PS fragment ions was enhanced according to existence of deposited Au particles. These results indicated that a precise analysis of 3D MetA-SIMS can be realized.

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Section: Resultssupporting

confidence: 80%

Section: Introductionmentioning

confidence: 70%

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Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS

Yamazaki

Akiba

Tomiyasu

et al. 2015

e-J. Surf. Sci. Nanotech.

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“…However, the simulation program has no references for shave-off conditions, which is high energy (over 20 keV), and has a high angle of incidence (over 80 degrees) of gallium focused ions. Therefore, in order to verify that the SDTrimSP simulation results are in good agreement Copyright (c) 2019 by The Surface Analysis Society of Japan with the experimental data even under the shave-off condition, we simulated and compared the angular distribution of sputtered particles based on the previous experimental data [10].…”

Section: Introductionmentioning

confidence: 89%

Angular Distribution of Sputtered Particles in Shave-off Section Processing with SDTrimSP

Kang¹,

Matsumura²,

Azuma³

et al. 2019

JSA

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The angular distribution of secondary ions is one of the essential elements for the development of three-dimensional (3D) shave-off SIMS. The magnification lens system in the 3D shave-off SIMS was designed and assembled based on the detection position of the secondary ion, the emission angle of the secondary ions defined the detection position on the detector. However, shave-off condition of high incidence energy (30 keV) and high angle of incidence (87 degrees), we simulated the angular distribution of sputtered particles using the SDTrimSP program and compared the results with the previous shave-off experimental data. Even unusual the shave-off beam, the SDTrimSP simulation results showed a good agreement and a similar tendency with the experimental data. SDTrimSP simulation is expected to be useful in obtaining the sputtered particle information for development and instrumentation of the 3D shave-off SIMS.

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Study of Thickness Distributions of Sputtered Gold Particles Deposited on a Perpendicular Section for Enhancement of 3D MetA-SIMS

Cited by 2 publications

References 7 publications

Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS

Development of 3D MetA-SIMS for organic materials using Dual FIB ToF-SIMS

Angular Distribution of Sputtered Particles in Shave-off Section Processing with SDTrimSP

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