2022
DOI: 10.1109/jmems.2022.3187793
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Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation

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Cited by 4 publications
(2 citation statements)
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“…Additionally, there is no lateral contact force between the probe and the surface, so it is possible to investigate more fragile surfaces (e.g., biofilms, proteins) in this mode 37 . Among the AFM modes, there is also a place for mixed techniques, which combine properties of both contact and non-contact, e.g., a tapping mode in which the probe touches the surface only at specific points, see, e.g., for details 38 42 .…”
Section: Experimental Procedures and Methodsmentioning
confidence: 99%
“…Additionally, there is no lateral contact force between the probe and the surface, so it is possible to investigate more fragile surfaces (e.g., biofilms, proteins) in this mode 37 . Among the AFM modes, there is also a place for mixed techniques, which combine properties of both contact and non-contact, e.g., a tapping mode in which the probe touches the surface only at specific points, see, e.g., for details 38 42 .…”
Section: Experimental Procedures and Methodsmentioning
confidence: 99%
“…In all the above mentioned solutions, the RTD nanoprobe is electrically biased, which leads to self-heating of the sensor, an effect that can generally be described as the so called back action phenomenon. Moreover, because SThM cantilevers are usually the multilayer structures, Joule heating in nanoprobe wiring induces parasitic structure deflection [6]. From that perspective, the entire measurement setup must be designed so as to ensure the highest SNR at the lowest possible sensor bias.…”
Section: Introductionmentioning
confidence: 99%