Integration of piezoelectric and electrothermal actuators for high-resolution Atomic Force Microscopy

Nasrabadi, Hazhir Mahmoodi; Nikooienejad, Nastaran; Vikrant, K.S.; Moheimani, S.O. Reza

doi:10.1016/j.mechatronics.2024.103165

Mechatronics

2024

DOI: 10.1016/j.mechatronics.2024.103165

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Integration of piezoelectric and electrothermal actuators for high-resolution Atomic Force Microscopy

Hazhir Mahmoodi Nasrabadi,

Nastaran Nikooienejad,

K.S. Vikrant

et al.

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Integration of piezoelectric and electrothermal actuators for high-resolution Atomic Force Microscopy

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References 25 publications

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