Study of the Effect of Process Induced Uncertainties on the Performance of a Micro-Comb Resonator

Abstract

This paper presents a modeling technique based on the integration in the classic deterministic simulation methods of probabilistic computational techniques such as uncertainty analysis and sensitivity analysis. As study case, it is presented a micro-comb resonator that is actuated electrostatically to vibrate in the plane parallel to the substrate. A deterministic Finite Element coupled electromechanical analysis is performed to evaluate the mode shapes and the corresponding eigenfrequencies of the mobile mass and afterwards a Monte Carlo simulation is used to determine the dispersion of the eigenfrequency of the mode shape of interest in function of the variations of the input parameters. The scatter of the results is analyzed and then it is presented a sensitivity analysis for establishing which of the input parameters have more influence on the variability of the microresonators performance.

Identification of MEMS Geometric Uncertainties through Homogenization

“…Despite the increasing effort in such topics, MEMS fabrication process imperfections still represent unknowns for MEMS designers and a significant limitation for devices' performance and reliability. In [6,9], for example, the effect of process-induced uncertainties on the performance of MEMS devices is addressed, while in [10], it is demonstrated how fabrication imperfections impact energy loss through mechanical mode coupling. In [11], the imperfections coming from both the fabrication and assembly/packaging of Radio-Frequency MEMS devices are studied and categorized, while in [12], sensitivity analyses are proposed to study the effect of geometric and material uncertainties on the performance of MEMS resonators.…”

Analysis of Static and Dynamic Properties of Micromirror with the Application of Response Surface Method

“…As it is of common engineering practice, the procedures of virtual prototyping, including finite element (FE) analyses, are carried out to investigate static and dynamic properties of microdevices. Numerical simulations are applied to perform sensitivity analyses, analyses of uncertainty propagation, design optimization as well as a study of reliability and performance of modelled MEMS structure [7,14,15]. Computer simulations including also FE analyses, amongst obvious advantages, feature some inconveniences.…”

Uncertainty analysis for dynamic properties of MEMS resonator supported by fuzzy arithmetics

“…in terms of present geometry imperfections and changes of material properties of studied device. For uncertainty analysis, microresonator has been chosen as one of most commonly manufactured and exploited MEMS [5,6,7]. It is used e.g.…”