Study of radiation damage in an ion implanted rare-earth iron garnet crystal

Battistig, G.; Kennedy, Eamonn; Révész, Péter; Gyulai, J.; Kadar, G.; Gyimesi, J.; Drozdy, G.; Vizkelethy, G.

doi:10.1016/0168-583x(86)90324-1

Cited by 8 publications

(1 citation statement)

References 5 publications

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“…cross-section can be greatly enhanced for certain elements by raising the beam energy above the Rutherford region. In the case of oxygen there is the well known 16 O(α, α) 16 O resonance at 3.05 MeV beam energy for which the scattering crosssection at an angle of 168 • is about 25 times larger than the Rutherford value [10][11][12]. With this technique even small amounts of oxygen can be detected with good accuracy.…”

Section: Resonant Scatteringmentioning

confidence: 97%

Characterization of oxide films by MeV ion beam techniques

Döbeli¹

2008

J. Phys.: Condens. Matter

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MeV ion beam techniques can provide highly quantitative compositional analysis of surfaces and thin layers. This quantitativeness is due to the very well known elastic nuclear scattering cross-sections of MeV particles. The most commonly used techniques are Rutherford backscattering spectrometry and elastic recoil detection analysis. Owing to the energy loss of ions in the material, whole compositional depth profiles can be obtained in a single short measurement almost nondestructively. The sensitivity to oxygen can be enhanced by the use of nuclear resonances or forward scattering techniques. State-of-the-art ion beam analysis can determine thin film stoichiometries with an accuracy of 1% and a depth resolution in the low nm range. An overview of the available techniques is given and illustrated with examples.

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