2008
DOI: 10.1088/0953-8984/20/26/264010
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Characterization of oxide films by MeV ion beam techniques

Abstract: MeV ion beam techniques can provide highly quantitative compositional analysis of surfaces and thin layers. This quantitativeness is due to the very well known elastic nuclear scattering cross-sections of MeV particles. The most commonly used techniques are Rutherford backscattering spectrometry and elastic recoil detection analysis. Owing to the energy loss of ions in the material, whole compositional depth profiles can be obtained in a single short measurement almost nondestructively. The sensitivity to oxyg… Show more

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Cited by 20 publications
(14 citation statements)
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“…14,16 The film stoichiometries, normalized to the sum of cationic mole fractions, are Zr 0.93±0.01 Y 0.06±0.01 Hf 0.013±0.001 O 1.77-1.97±0.04 . Hafnium is detected as the only element in addition to Zr, Y and O, on a level of 1.6-2.0 wt.% which is common for zirconia-based compounds.…”
Section: Stoichiometry and Phase Composition Of 3ysz Filmsmentioning
confidence: 99%
“…14,16 The film stoichiometries, normalized to the sum of cationic mole fractions, are Zr 0.93±0.01 Y 0.06±0.01 Hf 0.013±0.001 O 1.77-1.97±0.04 . Hafnium is detected as the only element in addition to Zr, Y and O, on a level of 1.6-2.0 wt.% which is common for zirconia-based compounds.…”
Section: Stoichiometry and Phase Composition Of 3ysz Filmsmentioning
confidence: 99%
“…As E 1 is an unambiguous function of M 2 , the elemental composition of the film can be obtained from the energy spectra [61]. RBS is especially suited to detect heavy elements, since the differential cross-section, which describes the probability of observing a scattering event, is proportional to the square of the atomic number of the target atom.…”
Section: Rutherford Backscattering and Time Of Flight Elastic Recoil mentioning
confidence: 99%
“…The chemical composition was determined using Rutherford Backscattering Spectroscopy (RBS) and Particle Induced X-ray Emission (PIXE) [25]. RBS was performed with a 5 MeV He-4 beam in order to be able to separate Gd and Ce.…”
Section: Microstructural and Chemical Characterizationmentioning
confidence: 99%