2010
DOI: 10.1016/j.jeurceramsoc.2009.06.012
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Yttria-stabilized zirconia thin films by pulsed laser deposition: Microstructural and compositional control

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Cited by 73 publications
(60 citation statements)
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“…The ASR dependence on temperature follows an Arrhenius-type law for both the YSZ and the LSC, with activation energies of E a =1.05(1) eV and E a =1.54(4) eV, respectively. These values are in concordance with previously reported values for the corresponding bulk materials (see [31,54,[56][57][58] for YSZ and [21,22,24,42] for LSC).…”
Section: Accepted Manuscriptsupporting
confidence: 93%
“…The ASR dependence on temperature follows an Arrhenius-type law for both the YSZ and the LSC, with activation energies of E a =1.05(1) eV and E a =1.54(4) eV, respectively. These values are in concordance with previously reported values for the corresponding bulk materials (see [31,54,[56][57][58] for YSZ and [21,22,24,42] for LSC).…”
Section: Accepted Manuscriptsupporting
confidence: 93%
“…The oxygen stoichiometry showed that the metallic elements are fully oxidized and the oxygen stoichiometry is reached even if the films have been grown under vacuum. This result is not in agreement with what Heiroth et al [15] have found for YSZ films deposited onto sapphire substrates by PLD (KrF laser, 4 J/cm 2 and 600°C). These authors evidenced that for oxygen pressures lower than 1 Pa, films are oxygen deficient.…”
Section: %Y Xcontrasting
confidence: 99%
“…This indicates that as-deposited RMS films are very stable under oxidizing conditions. Stability in oxidizing atmosphere is one of the well known properties of YSZ [15]. Thus, in the following, as-deposited RMS and PLD thin films will be presented and compared.…”
Section: Resultsmentioning
confidence: 99%
“…YSZ thin films grown by pulsed laser deposition (PLD) are known to exhibit a columnar morphology with diameters around 20 nm. [7][8][9] This morphology is expected to follow the structure zone model of Thornton 10 and could be overcome by an increase of the deposition temperature. However, with the very high melting point of YSZ above 2900 K, 11 deposition temperatures of at least 1500 K would be required for a significant change of the microstructure on technically relevant substrates.…”
mentioning
confidence: 93%
“…The film has a columnar structure parallel to the surface normal with an average column width of ∼20 nm as reported in literature. [7][8][9] By applying an inclination of 45…”
mentioning
confidence: 99%