The use of the 3.05 MeV oxygen resonance for 4He backscattering near-surface analysis of oxygen-containing high Z compounds

Blanpain, Bart; Révész, Péter; Doolittle, Lawrence; Purser, K.H.; Mayer, J. W.

doi:10.1016/0168-583x(88)90150-4

Cited by 73 publications

(4 citation statements)

References 6 publications

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“…cross-section can be greatly enhanced for certain elements by raising the beam energy above the Rutherford region. In the case of oxygen there is the well known 16 O(α, α) 16 O resonance at 3.05 MeV beam energy for which the scattering crosssection at an angle of 168 • is about 25 times larger than the Rutherford value [10][11][12]. With this technique even small amounts of oxygen can be detected with good accuracy.…”

Section: Resonant Scatteringmentioning

confidence: 97%

Characterization of oxide films by MeV ion beam techniques

Döbeli¹

2008

J. Phys.: Condens. Matter

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MeV ion beam techniques can provide highly quantitative compositional analysis of surfaces and thin layers. This quantitativeness is due to the very well known elastic nuclear scattering cross-sections of MeV particles. The most commonly used techniques are Rutherford backscattering spectrometry and elastic recoil detection analysis. Owing to the energy loss of ions in the material, whole compositional depth profiles can be obtained in a single short measurement almost nondestructively. The sensitivity to oxygen can be enhanced by the use of nuclear resonances or forward scattering techniques. State-of-the-art ion beam analysis can determine thin film stoichiometries with an accuracy of 1% and a depth resolution in the low nm range. An overview of the available techniques is given and illustrated with examples.

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Section: Resonant Scatteringmentioning

confidence: 97%

Characterization of oxide films by MeV ion beam techniques

Döbeli¹

2008

J. Phys.: Condens. Matter

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“…24 Figure 4 displays the results obtained from analysis of the films deposited at 450°C for beam energies equal to or slightly larger than the oxygen resonance energy of 3.045 MeV. The film composition was studied using resonanceenhanced RBS.…”

Section: B Ruo 2 Deposition On Al 2 O 3 (0001)mentioning

confidence: 99%

Reactive-sputter deposition and structure of RuO2 films on sapphire and strontium titanate

Wang¹,

Gladfelter²,

Evans³

et al. 1996

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Preparation of crystalline beta barium borate (βBaB2O4) thin films by opposedtargets magnetron sputteringMetallic films of RuO 2 were deposited by reactive-sputtering deposition on single crystal substrates of Al 2 O 3 ͑0001͒ and SrTiO 3 ͑100͒ at room temperature and 450°C. Measurement of the characteristic hysteresis loop revealed that the target's transition from a metal to a metal oxide surface occurred at a very high O 2 /Ar ratio ͑88%͒ under our experimental conditions. The hysteretical behavior of the transition was evaluated experimentally and was modeled. Resonance-enhanced Rutherford backscattering spectrometry established that the films deposited at 450°C had an oxygen to ruthenium ratio of 1.97, while a slightly higher value of 2.08 was observed for the films grown at room temperature. The latter films were amorphous, whereas those grown at 450°C exhibited a highly oriented polycrystalline microstructure. On SrTiO 3 ͑100͒, the RuO 2 ͑100͒ plane is parallel to the substrate surface, but no in-plane orientation was found. The same face, RuO 2 ͑100͒, was also parallel to the surface of Al 2 O 3 ͑0001͒, and the ͓001͔ direction of individual grains of RuO 2 aligned with the three ͗1 010͘ directions of the substrate to produce a threefold mosaic microstructure.

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“…If the center of mass energy of the scattering partners results in an excited state of the possible compound nucleus a drastically enhanced cross section for scattering can be observed, which can exceed the Rutherford cross section by orders of magnitude [9]. Having been initially used for analysis of angular momentum and parity of nuclear levels [10], these cross sections were later also employed to perform analysis with enhanced sensitivity in light element detection [2] but only rarely for quantitative composition analysis [11,12]. Continuous experimental investigations have, however, improved knowledge on the resonant scattering cross sections [13][14][15][16] and high-quality interpolation of this data is available [17].…”

Section: Introductionmentioning

confidence: 99%