2008
DOI: 10.1016/j.msea.2007.04.030
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Study of macrodroplet and growth mechanisms with and without ion etchings on the properties of TiN coatings deposited on HSS using cathodic arc physical vapour deposition technique

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Cited by 28 publications
(10 citation statements)
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“…The difference in the droplet phase of the TiN deposited surface was caused by the nitrogen flow rate and coating roughness parameter [26]. Table 5 it has good agreement with the surface profilometer (Taylor Hobson Profilometer) measurement.…”
Section: Surface Studiessupporting
confidence: 57%
“…The difference in the droplet phase of the TiN deposited surface was caused by the nitrogen flow rate and coating roughness parameter [26]. Table 5 it has good agreement with the surface profilometer (Taylor Hobson Profilometer) measurement.…”
Section: Surface Studiessupporting
confidence: 57%
“…The high surface roughness in the coated conditions is due to droplets (indicated by arrows) in the TiN-coatings, see Figure 1. These microstructural heterogeneities, here of sizes up to several microns, are typical in films deposited by cathodic arc evaporation [31][32][33][34][35]. They are usually weakly bonded to the bulk coating and prompted to drop out from the surface under tribomechanical service conditions [34,36,37].…”
Section: Surface Integrity Characterization: Roughness Subsurface Damentioning
confidence: 99%
“…Their major applications include protective coatings on cutting tools, decorative coatings in architectural components, and diffusion barriers in integrated circuits. Many techniques such as physical vapor deposition [3,4], chemical vapor deposition [5][6][7][8], and reactive magnetron sputtering [9][10][11] have been used to produce TiN films. Mubarak et al deposited TiN films on highspeed steel substrate using cathodic arc physical vapor deposition [4].…”
Section: Introductionmentioning
confidence: 99%