Studies on three-dimensional moulding, bonding and assembling of low-temperature-cofired ceramics for MEMS and MST applications

Khanna, P. K.; Hornbostel, B.; Burgard, Matthias; Schäfer, W.; Dorner, Johann

doi:10.1016/j.matchemphys.2004.08.031

Cited by 20 publications

(16 citation statements)

References 5 publications

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“…chemical inactivity, hermeticity, matching of thermal expansion coefficient with silicon, high temperature stability, and 3D structuration) [1,2]. Especially interesting are microfluidic applications.…”

Section: Introductionmentioning

confidence: 99%

Microchannel fabrication process in LTCC ceramics

Malecha

Gołonka

2008

Microelectronics Reliability

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Section: Introductionmentioning

confidence: 99%

Microchannel fabrication process in LTCC ceramics

Malecha

Gołonka

2008

Microelectronics Reliability

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“…Most micro-sensors such as pressure sensors, flow sensors, etc., are created using silicon material [1][2][3][4][5][6]. In recent years, however, low-temperature co-fired ceramic (LTCC) technology has been applied in various fields, including electrochemical devices, (bio)medical devices, pressure sensors, flow sensors, etc., [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology

Tan

Zhang

et al. 2014

Micromachines

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Abstract:In this paper, a novel capacitance pressure sensor based on Low-Temperature Co-Fired Ceramic (LTCC) technology is proposed for pressure measurement. This approach differs from the traditional fabrication process for a LTCC pressure sensor because a 4J33 iron-nickel-cobalt alloy is applied to avoid the collapse of the cavity and to improve the performance of the sensor. Unlike the traditional LTCC sensor, the sensitive membrane of the proposed sensor is very flat, and the deformation of the sensitivity membrane is smaller. The proposed sensor also demonstrates a greater responsivity, which reaches as high as 13 kHz/kPa in range of 0-100 kPa. During experiments, the newly fabricated sensor, which is only about 6.5 cm 2 , demonstrated very good performance: the repeatability error, hysteresis error, and nonlinearity of the sensor are about 4.25%, 2.13%, and 1.77%, respectively.

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“…Next, the LTCC module is cofired at a two-step thermal profile with a peak temperature of 850-900 o C. Fired LTCC material usually has very good temperature stability (up to 650 o C) [2,3], and some compositions also exhibit a high degree of chemical resistance, making them suitable for fabrication of chemical microreactors, even for aggressive substances [4]. Finally, its CTE (coefficient of thermal expansion) is reasonably well matched to that of silicon [5]. Thanks to all these advantages, LTCC technology is well established in both low-volume, high-performance and highvolume, low-cost applications.…”

Section: Introductionmentioning

confidence: 99%