Microfabrication of a Novel Ceramic Pressure Sensor with  High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology

Li, Chen; Tan, Qiulin; Zhang, Wendong; Chen, Xue; Li, Yunzhi; Xiong, Jijun

doi:10.3390/mi5020396

Cited by 14 publications

(4 citation statements)

References 16 publications

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“…The low temperature co-fired ceramic technology is frequently used for fabricating hybrid microelectronic devices [13,29,30]. The main advantage of LTCC-based hybrids is high environmental resistance.…”

Section: Low Power Ltcc Flow Sensormentioning

confidence: 99%

LTCC Flow Sensor with RFID Interface

Węglarski

Jankowski-Mihułowicz

Pitera

et al. 2020

Sensors

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The idea of battery-less flow sensors and their implementation in wireless measurement systems is presented in this research article. The authors take advantage of their latest achievements in the Low Temperature Co-fired Ceramic (LTCC) technology, RadioFrequency Identification (RFID) technique, and increasing availability of low power electronics in order to get rid of the need to use electrochemical cells in a power supply unit of the elaborated device. To reach this assumption, special care has to be put on the energy balance in such an autonomous sensor node. First of all, the new concept of an electromagnetic LTCC turbine transducer with a signal conditioner which only draws a current of around 15 µA, is proposed for measuring a flow rate of fluids. Next, the autonomy of the device is showed; measured data are gathered in a microcontroller memory and sent to a control unit via an RFID interface which enables both information exchange and power transfer. The energy harvested from the electromagnetic field is used to conduct a data transmission, but also its excess can be accumulated, so the proposed sensor operates as a semi-passive transponder. The total autonomy of the device is achieved by implementing a second harvester that continually gathers energy from the environmental electromagnetic field of common active radio systems (e.g., Global System for Mobile Communications (GSM), wireless network Wi-Fi).

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Section: Low Power Ltcc Flow Sensormentioning

confidence: 99%

LTCC Flow Sensor with RFID Interface

Węglarski

Jankowski-Mihułowicz

Pitera

et al. 2020

Sensors

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“…In 2014, researchers at the North University of China proposed improved structural models based on the LTCC, HTCC, and thick-film integrated technologies to improve the performance parameters (e.g., sensitivity, pressure range, operating temperature range, and coupling distance between the sensor and antenna) in harsh environments. Experimental results demonstrated good performance of these improved sensors, namely, sensitivity of up to 13 kHz/kPa, maximum working distance of up to 5 cm, maximum working pressure of up to 60 bar, and consistently low repeatability and hysteresis errors [ 22 , 23 , 24 , 25 , 26 ].…”

Section: Research Status Of Wireless Passive Lc Sensors For Harsh mentioning

confidence: 99%

Review of Research Status and Development Trends of Wireless Passive LC Resonant Sensors for Harsh Environments

Tan

Jia

et al. 2015

Sensors

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Measurement technology for various key parameters in harsh environments (e.g., high-temperature and biomedical applications) continues to be limited. Wireless passive LC resonant sensors offer long service life and can be suitable for harsh environments because they can transmit signals without battery power or wired connections. Consequently, these devices have become the focus of many current research studies. This paper addresses recent research, key technologies, and practical applications relative to passive LC sensors used to monitor temperature, pressure, humidity, and harmful gases in harsh environments. The advantages and disadvantages of various sensor types are discussed, and prospects and challenges for future development of these sensors are presented.

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“…Engineering or advanced ceramics are widely applied in industrial parts because of extremely good properties . For example, these ceramics can be found in bearings, turbine blades, heat engine components, and cutting tools .…”

Section: Introductionmentioning

confidence: 99%

Characterization of green Al₂O₃ ceramics surface machined by tools with textures on flank‐face in dry turning

Liu

Deng

Wang

et al. 2019

Int J Applied Ceramic Tech

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Green Al2O3 ceramics through cold isostatic pressing were produced. Scratch tests were performed to evaluate the machinability. Texturing was applied on the flank‐face of the WC/Co tools by laser. Tools with textures on the flank‐face were adopted in dry cylindrical turning of the green Al2O3 ceramics. Characterization of green ceramic surfaces machined by flank‐face textured tools was studied. Results revealed that green ceramics had good enough machinability in cutting tests and scratch tests. There were no visible cracks on the surface after machining. Flank‐face textured tools could improve the surface integrity during processing green Al2O3 ceramics. Mechanisms responsible were found that derivative‐cutting behavior by flank‐face textures was able to remove visible hard inclusions on surfaces of green ceramics, which made the surfaces much smoother. More tiny ceramic powders generated by the phenomenon were pressed on the surfaces of green ceramics, which made further efforts on improving surface quality. Machining parameters had significant impacts on surface integrity. Within machining parameters, surface quality became better and compaction area was found on surfaces of green Al2O3 ceramics with the increase of cutting depth, but there were still visible hard inclusions and spalling of materials on the surface after machining.

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Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology

Cited by 14 publications

References 16 publications

LTCC Flow Sensor with RFID Interface

LTCC Flow Sensor with RFID Interface

Review of Research Status and Development Trends of Wireless Passive LC Resonant Sensors for Harsh Environments

Characterization of green Al₂O₃ ceramics surface machined by tools with textures on flank‐face in dry turning

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Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology

Cited by 14 publications

References 16 publications

LTCC Flow Sensor with RFID Interface

LTCC Flow Sensor with RFID Interface

Review of Research Status and Development Trends of Wireless Passive LC Resonant Sensors for Harsh Environments

Characterization of green Al2O3 ceramics surface machined by tools with textures on flank‐face in dry turning

Contact Info

Product

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Characterization of green Al₂O₃ ceramics surface machined by tools with textures on flank‐face in dry turning