Studies of the discharge properties of unbalanced magnetron sputtering system

Zong-Xin, Mu; Li, Guoqing; De-Liang, Che; Kai-yu, Huang; Liu, Cui

doi:10.1016/j.surfcoat.2004.07.059

Cited by 4 publications

(2 citation statements)

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“…At a lower pressure, this occurs at higher breakdown voltage as well as at a higher average power output for fixed pulse repetition frequency. The unbalanced magnetic field of the coaxial coil in the UMS discharge is used to control the ion beams incident to the substrate in the deposition, and in turn to control the voltage-current characteristic [11] . In the HPPUMS discharge, the coaxial coil plays an important role in controlling the pulse repetition frequency matched to the pressure.…”

Section: Resultsmentioning

confidence: 99%

“…A coaxial coil causes the formation of an unbalanced magnetic field that is used to control the pulse repetition frequency and to confine the discharge plasma. The mechanism by which the coaxial coil affects the pulse repetition frequency can be explained by its effects on the breakdown voltage [15] . However, further research must be conducted on this topic.…”

Section: Analysis Of Discharge Propertiesmentioning

confidence: 99%

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Discharge Properties of High-Power Pulsed Unbalanced Magnetron Sputtering

Zong-Xin¹,

Liu²,

Zang³

et al. 2011

Plasma Sci. Technol.

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High-power pulsed magnetron sputtering (HPPMS or HiPIMS) is an emerging coating technology that produces very dense plasmas and highly ionized sputtering atoms. This paper is focused on discharge properties, unbalanced features and temporal evolution of pulse current of the HPPMS discharge. A hollow cathode was used to suppress the scattering of charges. A coaxial coil surrounding the target was used to control the breakdown voltage and pulse repetition frequency by varying the coil current. A Langmuir probe and an oscilloscope were used to simultaneously measure the floating potential, pulse voltage and pulse current signals. The pulse power density in the discharge reached 10 kW/cm 2 with frequencies as high as ∼40 Hz and a pulse width about 1∼5 ms. The characteristics of the discharge evolution were analyzed using magnetron discharge dynamics.

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Section: Resultsmentioning

confidence: 99%

Section: Analysis Of Discharge Propertiesmentioning

confidence: 99%