Structures, mechanical properties and thermal stability of TiN/SiNx multilayer coatings deposited by magnetron sputtering

Multilayered vacuum-arc nanocomposite TiN/ZrN coatings before and after annealing: Structure, properties, first-principles calculations

“…Vacuum-arc evaporation of cathode is a promising deposition method, which allows fabrication of multilayered coatings on the base of nitrides and carbides of transition metals [5][6][7][8]. A varying the deposition conditions, such as gas pressure in the deposition chamber, bias potential, bilayer thickness, etc.…”

Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process

“…Multilayer thin films generally exhibit enhanced mechanical properties and thermal stability compared to their single layer counterparts [4][5][6][7]. For example, a study of Chang et al showed that nano-scaled TiAlN/CrN multilayered coatings with a bi-layer thickness ranging from 6 to 12 nm have high hardness values of ∼36 GPa [6].…”

“…For example, a study of Chang et al showed that nano-scaled TiAlN/CrN multilayered coatings with a bi-layer thickness ranging from 6 to 12 nm have high hardness values of ∼36 GPa [6]. Multilayered TiN/SiN x coatings exhibited enhanced thermal stability compared to the single layer counterpart [7]. Chen et al showed that the multilayered structure can be preserved after annealing at 1000 • C when the SiN x layer thickness is ∼0.8 nm of multilayered TiN/SiN x coatings [5].…”

“…Chen et al showed that the multilayered structure can be preserved after annealing at 1000 • C when the SiN x layer thickness is ∼0.8 nm of multilayered TiN/SiN x coatings [5]. It was concluded that the smaller the bi-layer period thickness is, the better these properties are before a critical value is reached [6,7].…”

TiNx thin films for energy-saving application prepared by atmospheric pressure chemical vapor deposition

“…On the other hand, owing to the extreme hardness, high melting temperature, good corrosion and wear resistance, low electrical and thermal resistance, high thermal stability and golden color, titanium nitride (TiN) are widely applied as cutting tools, strengthening phases, diffusion barriers, electrical contacts and decorative coatings [4][5][6][7][8]. It also exhibits special optical performance such as high reflectivity at the red-end of the visible spectrum and low reflectivity near the ultraviolet region, which results in the golden appearance [9].…”