Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process

Sun, Peng; Su, Chung-Yen; Liou, Tai Pin; Hsu, Chia-Hsiang; Lin, Chung Kwei

doi:10.1016/j.jallcom.2010.12.057

Cited by 32 publications

(3 citation statements)

References 17 publications

(22 reference statements)

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“…A significant improvement in the value of hardness and elastic modulus was observed in PZT/Ti/NiTi (6.9 and 169 GPa) and PZT/TiN/NiTi (7.6 and 175 GPa), respectively. Higher hardness for sample P 3 and sample P 4 could be attributed to the improved adhesion between PZT and NiTi films provided by hard and adherent Ti, TiN buffer layers [58,59] . It is also noticed that the hardness of PZT/NiTi thin films show a dependence on the surface roughness of the films.…”

Section: Mechanical Propertiesmentioning

confidence: 97%

Influence of buffer layer on structural, electrical and mechanical properties of PZT/NiTi thin film heterostructures

Choudhary

Kaur

2012

Journal of Alloys and Compounds

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Section: Mechanical Propertiesmentioning

confidence: 97%

Influence of buffer layer on structural, electrical and mechanical properties of PZT/NiTi thin film heterostructures

Choudhary

Kaur

2012

Journal of Alloys and Compounds

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“…From this aspect, a number of transition metal (TM) based multilayer combinations, including metal/ metal, metal/ceramics and ceramics/ceramics have been recently investigated. 11,[13][14][15] It is well-known that carbide coatings possess superior wear resistance properties than nitride coatings due to the presence of the carbon matrix at the grain boundaries of TMC crystallites. 16 These carbons facilitate the grain boundary sliding that introduces ductility and inhibits the nucleation and migration of cracks, resulting in enhanced wear resistance.…”

Section: Introductionmentioning

confidence: 99%

Reactive magnetron sputtered wear resistant multilayer transition metal carbide coatings: microstructure and tribo-mechanical properties

Kumar

Kalaiselvam

et al. 2015

RSC Adv.

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To enhance the performance and durability of mechanical components, surface properties need to be modified. In this work, a unique combination of transition metal carbide (TMC) multilayer coatings (TiC/ CrC, TiC/ZrC and TiC/WC) were deposited by reactive DC magnetron sputtering on 316LN steel substrates. GIXRD results showed the presence of an amorphous CrC phase in the TiC/CrC multilayer, whereas, crystalline TiC, ZrC and W 2 C phases were observed in their respective coatings. FESEM analysis indicated the non-columnar structures of TMC layers in all the samples, except the CrC layer in the TiC/ CrC multilayer. Solid solutions of the TiC and WC layers at the interface were identified due to the migration of W atoms into the TiC crystal lattices. The poor crystalline nature of the TiC/CrC multilayer led to lower hardness and weak wear resistance. However, enhanced tribo-mechanical properties were observed in TiC/ZrC and TiC/WC multilayer coatings. This is explained by the improved crystallinity and enhanced resistance to plastic deformation. For the selected tribological parameters, abrasive, adhesive and combined abrasive/adhesive wear modes are the major governing factors in determining the wear behaviors of TiC/CrC, TiC/ZrC and TiC/WC coatings, respectively. The chemical stability of deformed wear tracks was observed by Raman spectroscopy.

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“…Multilayer films have attracted great attention in recent years [1] because of their promising properties [2]. Much of the work has been focused on multilayer films based on TiN [3][4][5][6][7][8][9][10][11][12][13][14][15][16]. In recent years, TiN/metal multilayer films such as TiN/Ti [11][12][13][14], TiN/Cu [15], and TiN/W [16] have been extensively studied.…”

Section: Introductionmentioning

confidence: 99%

Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition

Shang

Shao

2014

Advances in Materials Science and Engineering

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TiN/Ta multilayer film with a modulation period of 5.6 nm and modulation ratio of 1 : 1 was produced by ion beam assisted deposition. Microstructure of the as-deposited TiN/Ta multilayer film was observed by transmission electron microscopy and mechanical properties were investigated. Residual stress in the TiN/Ta multilayer film was about 72% of that of a TiN monolayer film with equivalent thickness deposited under the same conditions. Partial residual stress was released in the Ta sublayers during deposition, which led to the decrease of the residual stress of the TiN/Ta multilayer film. Nanohardness (H) of the TiN/Ta multilayer film was 24 GPa, 14% higher than that of the TiN monolayer film. It is suggested that the increase of the nanohardness is due to the introduction of the Ta layers which restrained the growth of TiN crystal and led to the decrease of the grain size. A significant increase (3.5 times) of theH3/E2(Eelastic modulus) value indicated that the TiN/Ta multilayer film has higher elasticity than the TiN monolayer film. TheLc(critical load in nano-scratch test) value of the TiN monolayer film was 45 mN, which was far lower than that of the TiN/Ta multilayer film (around 75 mN). Results of the indentation test showed a higher fracture toughness of the TiN/Ta multilayer film than that of the TiN monolayer film. Results of differential scanning calorimetric (DSC) and thermo gravimetric analysis (TGA) indicate that the TiN/Ta multilayer film has better thermal stability than the TiN monolayer film.

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Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process

Cited by 32 publications

References 17 publications

Influence of buffer layer on structural, electrical and mechanical properties of PZT/NiTi thin film heterostructures

Influence of buffer layer on structural, electrical and mechanical properties of PZT/NiTi thin film heterostructures

Reactive magnetron sputtered wear resistant multilayer transition metal carbide coatings: microstructure and tribo-mechanical properties

Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition

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