Structure and stressed state of molybdenum layers in Mo/Si multilayers

Pinegyn, V.I.; Zubarev, E. N.; Кондратенко, В. В.; Sevryukova, V.A.; Yulin, Sergiy; Feigl, Torsten; Kaiser, Norbert

doi:10.1016/j.tsf.2007.10.123

Cited by 17 publications

(10 citation statements)

References 18 publications

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“…14,[30][31][32][33] Neither TEM imaging is effective in reliable identification of mixed zones of the cobalt and carbon 14 in contrast to, for example, mixed zones of Mo/Si and Sc/Si structures which usually form crystalline metal layers. 34,35 However, there are other experimental methods which can be used for investigation of interlayer interactions of short-period Co/C multilayer structures. Chernov et al 36,37 successfully used EXAFS spectroscopy to study thin cobalt layers with the thickness 1.2 nm.…”

Section: Structural Characteristics Of Short-period Co/c Multilayer Mmentioning

confidence: 99%

Short-Period Multilayer X-ray Mirrors for “Water” and “Carbon Windows” Wavelengths

Kopylets

Devizenko

Zubarev

et al. 2019

j nanosci nanotechnol

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This review paper summarizes and provides an overview of our recent studies related to two types of short-period multilayer X-ray mirrors, W/B 4 C and Co/C. It deals with the experimental observation of the layer intermixing effects and how they affect the X-ray mirror's optical performance. The paper presents also some examples of using the fabricated X-ray mirrors in focusing and imaging experiments at the working wavelengths 2.48 nm and 4.47 nm.

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Section: Structural Characteristics Of Short-period Co/c Multilayer Mmentioning

confidence: 99%

Short-Period Multilayer X-ray Mirrors for “Water” and “Carbon Windows” Wavelengths

Kopylets

Devizenko

Zubarev

et al. 2019

j nanosci nanotechnol

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“…The development of stress in Mo layers grown on a-Si is strongly dependent on the layer thickness [55,59]. Factors influencing the development of stressed state in the Mo layer were identified as bombardment by energetic particles, generating biaxial compressive stress, and recrystallization, which introduces tensile stress [59].…”

Section: Blister Developmentmentioning

confidence: 99%

“…Factors influencing the development of stressed state in the Mo layer were identified as bombardment by energetic particles, generating biaxial compressive stress, and recrystallization, which introduces tensile stress [59]. With reference to the published work in relation to the effect of buried strained SiGe layers on hydrogen localization [14,15], blister formation localized near the Mo-on-Si interface coupled with H accumulation at the Si-on-Mo interface points to determining influences of compressive and tensile strained centres within the respective interfacial layers.…”

Section: Blister Developmentmentioning

confidence: 99%

Hydrogen-induced blistering of Mo/Si multilayers: Uptake and distribution

2013

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We report on the uptake of deuterium by thin-film Mo/Si multilayer samples as a result of exposure to fluxes of predominantly thermal atomic and molecular species, but also containing a small fraction of energetic (800-1000 eV) ions. These exposures result in blister formation characterized by layer detachment occurring exclusively in the vicinity of the Mo-on-Si interfaces.This localization is attributed to strained centres introduced within the interfacial region during silicide formation and subsequent Mo crystallization. The correlation between D-content and blistering was studied. After an initial uptake period the D-content stabilized at ~1.3×10 vacancies within the layer as a consequence of its polycrystalline structure and its highlyconstrained state.

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“…Figure 1 shows the GIXRD curves which represent the diffraction peaks of Al (311) atomic plane obtained from the surfaces of aluminum samples irradiated by HCPEB with 1, 5 and 10 pulses, respectively. Based on [15], the values of deformation () and stress () could be estimated using the formulas: It is indicated that all the diffraction peaks of the aluminum samples irradiated by HCPEB shift towards low angle compare with the unstressed aluminum sample, suggesting that significant tensive macrostresses in irradiated surface layer were found in this study. The curve of residual stress values vs. pulsed number was plotted in Figure 2.…”

Section: Methodsmentioning

confidence: 83%