Structure and optical properties of diamond like carbon films containing aluminium and alumina

Evolution of the Microstructure, Hybridization, and Internal Stress of Al-Doped Diamond-Like Carbon Coatings: A Molecular Dynamics Simulation

“…This probably hinders the growth of the carbon clusters and makes a smooth surface for that ta-C:Al films with high Al content. 7,21 Table 2 lists the density of the ta-C:Al films simulated under 100 eV and 2000 atoms, which was estimated and averaged from the deposition zone from the 18 Å layer to the top surface. It is noticed that the pure ta-C film without Al has a density of 2.97 g/cm 3 and sp 3 C fraction of approximately 70%, which agrees with the results simulated from AIMD.…”

“…However, with further increase in the Al content in the films, the network of Al atoms becomes compact and densified, particularly intercrossing with the carbon network of the matrix. This probably hinders the growth of the carbon clusters and makes a smooth surface for that ta-C:Al films with high Al content. , Table lists the density of the ta-C:Al films simulated under 100 eV and 2000 atoms, which was estimated and averaged from the deposition zone from the 18 Å layer to the top surface. It is noticed that the pure ta-C film without Al has a density of 2.97 g/cm 3 and sp 3 C fraction of approximately 70%, which agrees with the results simulated from AIMD. , Due to the atomic mass of Al and the amorphous state, the density increases with the increment of the Al dopant.…”

“…% Al. 21 It is necessary to study the Al existence states of Al atoms in DLC films from an atomistic scale.…”

“…Some studies reported that the dominant existence of Al in Al-DLC is the Al–O bonds, probably because of the O-incorporated impurities in the deposition chamber or exposure in the air. , Recently, a few reports have said that Al–C bonds could form more easily than Al–Al bonds in the Al-DLC films during PVD. , Some studies have confirmed that Al atoms solid-dissolve into the carbon matrix or form amorphous Al nanoparticles, which present Al-enriched stripes or blocks in transition electronic microscopy images. , Now, there is dispute about the surface roughness evolution of Al-DLCs with the Al-doping content. , Even more, there is no convincing reason why an Al-enriched stripe or block forms in Al-DLC films and no nano-crystallite of Al forms in DLC with more than 20 at. % Al . It is necessary to study the Al existence states of Al atoms in DLC films from an atomistic scale.…”

Characterization of amorphous carbon films from 5 nm to 200 nm on single-side polished a-plane sapphire substrates by spectroscopic ellipsometry

“…They deposited and prepared 13 different types of diamond-like films, established 10 optical models based on experience and existing knowledge, and verified their feasibility, where the thickness ranges from 26 to 300 nm. Domantas et al have investigated the effect of Al doping on the refractive index and extinction coefficient of hydrogen-free and hydrogenated DLC films with film thicknesses of 39 nm-47 nm and 84 nm-162 nm, respectively [21]. Yang et al have investigated the morphology, structure and optical properties of DLC films synthesized under different conditions.…”