Characteristics of DLC films doped with multi-element alloy

Abstract

Multi-element alloy doped diamond-like carbon (DLC) lms were coated using sputtering with a (AlCrNbSiTiV) target. TEM and XRD results indicated DLC lm had an amorphous compound feature incorporating poly-crystalline phases around the face-center-cubic structure, which were embedded into the amorphous carbon matrix. The Raman spectra and mechanical characteristics of the DLC lm sample were associated with concentration changes in the carbon and the multi-element alloy doped in the DLC lms, which depended on the DC power. This investigation indicated that improved mechanical properties, including hardness and the elastic recovery rate, can be obtained from the multi-element alloy doped DLC lm coated with proper DC sputtering power. These results demonstrated a proper DC power modi es the structure of multi-element alloy doped DLC lm and improves its mechanical performance. This study should pave the way for the development of DLC lm and elevate its application in various industries.Code availability: Not applicable.