1983
DOI: 10.1016/0022-3093(83)90640-3
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Structural studies of crystalline and amorphous SiGe alloys using EXAFS and Raman scattering

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Cited by 43 publications
(11 citation statements)
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“…The comparison between our theoretical results and the experimental data of Chapman et al [3], shown in the insets of this figure, shows that the structural models with random distribution of Ge atoms reproduce well the measured coordination numbers Z Ge-Ge , contrary to the networks with Ge atom segregations. This allows us to conclude that the mixing of the Si and Ge atoms within the first-coordination shell in the Si-rich a-Si 1 − x Ge x :H films is random as expected [3,30,32]. The hypothesis of phase segregation on the nanometer scale in Si-rich amorphous silicon-germanium alloys is then discarded.…”
Section: Discussionmentioning
confidence: 95%
“…The comparison between our theoretical results and the experimental data of Chapman et al [3], shown in the insets of this figure, shows that the structural models with random distribution of Ge atoms reproduce well the measured coordination numbers Z Ge-Ge , contrary to the networks with Ge atom segregations. This allows us to conclude that the mixing of the Si and Ge atoms within the first-coordination shell in the Si-rich a-Si 1 − x Ge x :H films is random as expected [3,30,32]. The hypothesis of phase segregation on the nanometer scale in Si-rich amorphous silicon-germanium alloys is then discarded.…”
Section: Discussionmentioning
confidence: 95%
“…The c-SiGe:H sample exhibits a weaker, shifted Si-Si peak from the crystallites due to the presence of nearby Ge. 9 A second, relatively sharp peak appears at ϳ400 cm Ϫ1 due to Si-Ge bonds in the crystallites, distinct from the broad peak at ϳ380 cm Ϫ1 observed in a-SiGe:H. served in this sample, appears at about 290 cm Ϫ1 with a broad shoulder towards lower frequencies. The 290 cm Ϫ1 peak can be ascribed to Ge-Ge bonds in the crystallites, shifted from the 300 cm Ϫ1 position in crystalline germanium due to the presence of nearby Si.…”
mentioning
confidence: 84%
“…The 290 cm Ϫ1 peak can be ascribed to Ge-Ge bonds in the crystallites, shifted from the 300 cm Ϫ1 position in crystalline germanium due to the presence of nearby Si. 9 In Fig. 1͑b͒, the x-ray scattering intensities from the c-Si:H and c-SiGe:H samples are plotted as functions of 2.…”
mentioning
confidence: 99%
“…The peak centered at ∼260, ∼390 and ∼455 cm À 1 is attributed to Ge-Ge, Si-Ge and Si-Si transverse optic (TO) vibration modes, respectively. The Ge-Ge peak at ∼260 cm À 1 is shifted from the 300 cm À 1 position in crystalline germanium due to the presence of nearby Si [12]. The shift in SiGe peak to ∼390 cm À 1 from the standard at 400 cm À 1 depends on the amount of Ge content in the film and a monotonic shift of this peak with Ge content has been reported by Rath et al [13].…”
Section: Effect Of Precursor Flow Rate Ratiomentioning
confidence: 71%