Structural properties of barium strontium titanate films grown under different technological conditions

Ferroelectric BaSrTiO3films structured by an intermediate annealing during the deposition

“…We note that a large tunability value obtained in this study compares favorably to the best values reported in the literature (for references, see e.g. [9]). Dielectric permittivity ε(0) calculated from the capacitance value was 720 for IA structured film and 590 for single-layer film.…”

“…The deposition was performed in oxygen ambient with a working pressure of 2 Pa on substrates of sapphire (r-cut) with a platinum underlayer at a temperature T S = 750°C. This temperature was chosen as the optimal one from the film composition point of view, according to [9]. The discharge power was about 180 W. Right after the 20 min of deposition of the first BST layer, the discharge was turned off and the intermediate annealing under oxygen ambient 2 Pa at 750°C for 10 min was adopted.…”

“…Multicomponent FE films can grow in a polycrystalline form with appearance of secondary phases [9]. The component composition of a FE film may differ from the source of deposited material [8].…”

Engineering of the frequency dependence of the ferroelectric properties of thin film Pt/Ba0.5Sr0.5TiO3/Pt structures

“…Subsequently Ba 0.5 Sr 0.5 TiO 3 (BSTO) is deposited on the Pt layer using a mixture of Ar/O 2 ≃1/1 as sputtering gas, a gas pressure of 4.2 Â 10 À 2 mbar and a RF power of 120 W resulting in a deposition rate of 0.06 nm/s. Various deposition temperatures in the range of 660-760°C (heater temperatures) are chosen [7]. After deposition the BSTO/Pt film is cooled down to room temperature in pure O 2 at a rate of 5°C/min.…”

Influence of the substrate temperature on the initial stages of growth of barium strontium titanate films on sapphire

“…In this regard, it is particularly interesting to investigate crystalline films of solid solutions, the structural properties of which change over wide ranges depending on the component composition. For example, in [10], it was shown that, upon deposition of oxide solid solutions by ionplasma sputtering, it becomes possible to match the crystal lattices of the growing film and the substrate due to the variation in the component composition of the solid solution by changing the temperature of the substrate during the deposition.…”