Structural characterization of preferentially oriented cubic BN films grown on Si (001) substrates

Ballal, A. K.; Salamanca‐Riba, L.; Taylor, C. A.; Doll, Gary L.

doi:10.1016/0040-6090(93)90456-y

Cited by 40 publications

(14 citation statements)

References 17 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…We note that some early HRTEM observations suggesting strongly oriented cBN at the substrate interface [79,104] resulted from the misidentification of the tBN (0002) lattice fringes as cBN lattice fringes [80]. In addition, heteroepitaxial cBN growth on both Si(OO1) and diamond has been reported.…”

Section: Cbn Lqwmentioning

confidence: 99%

“…Ballal et al [79] presented electron diffraction evidence from a cross-sectioned cBN film showing strong peaks in the cBN { 111) and { 220) rings indicating a strong preferential orientation that they interpreted as a [ 1 lo] out-of-plane texture. Medlin et al [206] have presented similar data, but show that the data can be also interpreted as a [ 11 l] in-plnrze (or 'double-fiber ') texture.…”

Section: Cbn Lqwmentioning

confidence: 99%

“…Specifically, Several explanations for the preferential cBN orientations have been proposed. 3allal et al [79] suggested a surface-energy argument, suggesting that a [ 1 lo] out-of-plane orientation might arise if cBN prefers to grow on a non-polar face since the (110) planes have an equal density of boron and nitrogen atoms. Using the same type of analysis described above for hBN, McKenzie et al [207] showed that the Gibbs energy of elastically strained cBN is lower if a [l 1 l] direction is within rather than perpendicular to a plane of biaxial stress.…”

Section: Cbn Lqwmentioning

confidence: 99%

“…The grain sizes observed in cBN films are quite small, ranging in diameter from a few nanometers to at most about 100 nm [ 1 1, 77,79,80,146,166,202].…”

Section: Cbn Lqwmentioning

confidence: 99%

“…In the dark-field technique, a small objective aperture is positioned to select a specific diffracted beam, which is used to form the image. For the BN system, segments of the tBN(0002) ring and the cBN( 111) ring are commonly used [ 11,77,79,80]. The regions of high electron intensity in such an image correspond to grains of the phase of interest.…”

Section: Dcrrk-jield Temmentioning

confidence: 99%

See 4 more Smart Citations

Review of advances in cubic boron nitride film synthesis

Mirkarimi¹,

McCarty²,

Medlin³

1997

Materials Science and Engineering: R: Reports

596

349

View full text Add to dashboard Cite

Cubic boron nitride (cBN) has a number of highly desirable mechanical, thermal, electrical, and optical properties. Because of this, there has been an extensive worldwide effort to synthesize thin films of cBN. Film synthesis is difficult in that without significant levels of ion bombardment during growth, only sp2-bonded BN forms, not sp3-bonded cBN. Recently there has been considerable progress in improving the deposition techniques and cBN film quality. In addition, progress has been made in understanding how energetic deposition conditions can lead to cBN formation. However, unanswered questions remain and process improvements are still needed. In this paper we critically and comprehensively review recent developments in cBN film synthesis and characterization. First, the structures and stability of the BN phases and characterization techniques are described. Next, the key experimental parameters controlling cBN film formation and synthesis techniques are discussed. Following a review of microstructure, the proposed mechanisms of cBN formation and the observed mechanical and electrical properties of cBN films are analyzed. We conclude by highlighting the current impediments to the practical realization of cBN-film technology. 0 1997 Published by Elsevier Science S.A.

show abstract

Section: Cbn Lqwmentioning

confidence: 99%

Section: Cbn Lqwmentioning

confidence: 99%

Section: Cbn Lqwmentioning

confidence: 99%

“…The grain sizes observed in cBN films are quite small, ranging in diameter from a few nanometers to at most about 100 nm [ 1 1, 77,79,80,146,166,202].…”

Section: Cbn Lqwmentioning

confidence: 99%

Section: Dcrrk-jield Temmentioning

confidence: 99%

See 3 more Smart Citations

Review of advances in cubic boron nitride film synthesis

Mirkarimi¹,

McCarty²,

Medlin³

1997

Materials Science and Engineering: R: Reports

596

349

View full text Add to dashboard Cite

show abstract

Vapor Phase Deposition of Cubic Boron Nitride Films

Bewilogua¹,

Richter²

2000

Handbook of Ceramic Hard Materials

View full text Add to dashboard Cite

Microstructure of <111>‐Textured Cubic Boron Nitride Film Deposited under Oxygen‐Containing Atmosphere

Choi,

Huh,

Park

et al. 2023

Adv Eng Mater

View full text Add to dashboard Cite

The cross‐sectional and planar microstructures of a cubic boron nitride (cBN) thin film with a <111> preferential orientation were observed using transmission electron microscopy. The cBN films were deposited by unbalanced magnetron sputtering under the condition that oxygen was added to a 20 sccm Ar‐N2(25%) gas mixture. The cross‐sectional view of the cBN film deposited with the addition of 0.4 sccm of oxygen showed a dual‐phase structure: turbostratic boron nitride (tBN) layers were filled between cBN columns, and the planar view showed that cBN crystals were surrounded by a tBN matrix. The films deposited under less than 0.4 sccm of oxygen addition showed a single‐phase structure with no tBN layers between the cBN columns. The difference between dual‐ and single‐phase structures is that they have preferred <111> and <220> orientations. This texture variation was interpreted as being due to the low residual stress of the dual‐phase‐structured cBN film and the low surface energy of the cBN (111) plane. The residual stress of the dual‐phase structure was significantly lower than that of the single‐phase structure. This is attributed to the compressive residual stress relieved by the tBN layers formed between the cBN columns.This article is protected by copyright. All rights reserved.

show abstract

Structural characterization of preferentially oriented cubic BN films grown on Si (001) substrates

Cited by 40 publications

References 17 publications

Review of advances in cubic boron nitride film synthesis

Review of advances in cubic boron nitride film synthesis

Vapor Phase Deposition of Cubic Boron Nitride Films

Microstructure of <111>‐Textured Cubic Boron Nitride Film Deposited under Oxygen‐Containing Atmosphere

Contact Info

Product

Resources

About