Review of advances in cubic boron nitride film synthesis

Abstract

Cubic boron nitride (cBN) has a number of highly desirable mechanical, thermal, electrical, and optical properties. Because of this, there has been an extensive worldwide effort to synthesize thin films of cBN. Film synthesis is difficult in that without significant levels of ion bombardment during growth, only sp2-bonded BN forms, not sp3-bonded cBN. Recently there has been considerable progress in improving the deposition techniques and cBN film quality. In addition, progress has been made in understanding how energetic deposition conditions can lead to cBN formation. However, unanswered questions remain and process improvements are still needed. In this paper we critically and comprehensively review recent developments in cBN film synthesis and characterization. First, the structures and stability of the BN phases and characterization techniques are described. Next, the key experimental parameters controlling cBN film formation and synthesis techniques are discussed. Following a review of microstructure, the proposed mechanisms of cBN formation and the observed mechanical and electrical properties of cBN films are analyzed. We conclude by highlighting the current impediments to the practical realization of cBN-film technology. 0 1997 Published by Elsevier Science S.A.

RETRACTED ARTICLE: Fundamental Discovery of New Phases and Direct Conversion of Carbon into Diamond and hBN into cBN and Properties

“…In addition, synthesis and scale-up processing of phase-pure cBN by both PVD and CVD methods are still very challenging, only up to~85 pct cBN content has been achieved. [23,25] The PVD methods close to equilibrium lead to the formation of hBN, and the formation of cBN requires highly nonequilibrium processing requiring energetic ion bombardment, localized stress, and high concentration of defects. [26][27][28] These observations tend to favor Corrigan and Bundy phase diagram (curve 1 in Figure 10) showing hBN as the stable phase and cBN metastable in the entire temperature range at ambient pressures.…”

High-Energy Density and Superhard Nitrogen-Rich B-N Compounds

“…It is isoelectronic to carbon, and forms analogues to various carbon structures (h-BN [8], r-BN [9], c-BN [10], w-BN [11], amorphous BN [12], BN nanotubes [13], and BN nanomesh [14]). These polymorphs exhibit exceptional mechanical, thermal, optical, and catalytic properties.…”

NMR Studies of BH3-attaching in the Zigzag and Armchair BN Nanotubes: A DFT Study

“…This material is employed in production of fiber. BNNTs fibers are utilized in production of commercial textile, military uniforms, and solar cells [10][11][12][13][14][15][16] . Many theoretical and experimental researches were conducted to study the synthesis of BNNTs.…”