Stress relief forms of diamond-like carbon thin films under internal compressive stress

Nir, D.

doi:10.1016/0040-6090(84)90500-5

Cited by 124 publications

(61 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Furthermore, the amorphous substrate cannot be expected to .play any role in constraining the propagation direction. The parallel sinusoidal buckling on a glass substrate observed by both Weissmantel and co-workers [7,8] and Nir [9] cannot be observed in the present work. As for the parallel buckling waves, the presence .of anisotropic internal stress might be the reason, as Nir points out [9].…”

Section: Resultscontrasting

confidence: 53%

Stress relief behaviour of diamond-like carbon films on glasses

Lee

Baik

Eun

1993

Diamond and Related Materials

View full text Add to dashboard Cite

The stress relief behaviour of diamond-like carbon (DLC) films on glass substrates was investigated. The r.f.-plasma-enhanced chemical vapour deposition method was used for the deposition with variable negative bias voltages of the cathode from -100 to -700 V. Beyond a critical thickness of the film, film delamination starts to occur after its removal from the reaction chamber. In addition to the previously observed stress relief morphologies, sinusoidal cracking and sinusoidal removal of the film are also observed. The stress relief morphology is dependent on the film thickness and the negative bias voltage. The measured wavelength of sinusoidal buckling increases with both increasing film thickness and increasing negative bias voltage. This behaviour is qualitatively consistent with a phenomenological equation derived by Nir. It was suggested that the elastic modulus of the DLC film can be calculated using the dependence of the wavelength of sinusoidal buckling on the film thickness and the negative bias voltage.

show abstract

Section: Resultscontrasting

confidence: 53%

Stress relief behaviour of diamond-like carbon films on glasses

Lee

Baik

Eun

1993

Diamond and Related Materials

View full text Add to dashboard Cite

show abstract

“…[1][2][3][4][5] Various patterns with interesting morphologies such as hillocks, 6 straight blisters, 7 and wavy patterns, [8][9][10][11][12] have been reported formation in compressed thin film-resulted from the thermal-induced mechanism. Some of these morphologies, such as the wavy patterns, have been ubiquitously observed in many different film-substrate systems, including deposited metal, [13][14][15] covalent-ionic compounds, 16 and diamondlike carbon films [17][18][19] on Si, glass, and steel substrates, respectively, which hint at a certain universality of underlying mechanics.…”

mentioning

confidence: 99%

Laser-induced wavy pattern formation in metal thin films

Xiao

Guan

Wang

et al. 2004

Applied Physics Letters

View full text Add to dashboard Cite

Laser-induced well-ordered and controllable wavy patterns are constructed in the deposited metal thin film. The micrometer-sized structure and orientation of the wavy patterns can be controlled via scanning a different size of rectangle laser spot on the films. Ordered patterns such as aligned, crossed, and whirled wave structures were designed over large areas. This patterning technique may find applications in both exploring the reliability and mechanical properties of thin films, and fabricating microfluidic devices. There is much current interest in the induced micropattern formation technique for their potential applications in microdevices. [1][2][3][4][5] Various patterns with interesting morphologies such as hillocks, 6 straight blisters, 7 and wavy patterns, [8][9][10][11][12] have been reported formation in compressed thin film-resulted from the thermal-induced mechanism. Some of these morphologies, such as the wavy patterns, have been ubiquitously observed in many different film-substrate systems, including deposited metal, 13-15 covalent-ionic compounds, 16 and diamondlike carbon films 17-19 on Si, glass, and steel substrates, respectively, which hint at a certain universality of underlying mechanics. The complexity of the blister shapes and the patterns has both fascinated and befuddled investigators, especially when the experimental and theoretical knowledge of the detailed mechanism is still unclear and the patterns are still unpredictable and uncontrollable. [20][21][22][23][24][25][26] Here, a laser-induced micropattern technique is reported to realize the controllability and be very helpful to the explanation of this phenomenon.Controllable wavy pattern formation in thin films in this study is presented in a schematic diagram [Figs. 1(a)-1(d)]. Aluminum films with typical thickness of 300 nm were deposited onto a glass substrate by an ac magnetron sputtering technique. During sputtering deposition, the substrate temperature was kept at 120°C, and then the system was cooled down slowly to room temperature ͑25°C͒ [ Fig. 1(a)]. With that, a rectangular laser beam focused on the area of smooth surface [ Fig. 1(b)]. The instantaneous injection of the thermal flux separated the irradiated region of the film from the substrate immediately due to the abrupt thermal expansion of the film and the large elastic mismatch between the film and the substrate. Then the film, as shown schematically in Fig. 1(c), delaminated from the substrate and deformed into wrinkles right away through the release of the internal compressive stress. The formation of the wavy pattern in the delaminated region is due to the existence of the isotropic biaxial compression in the film [ Fig. 1(d)]. This phenomenon is very sensitive to the laser flux with a certain range of energy when the compressive stress existed in thin filmsubstrate combinations.The process of the wavy structure formation is recorded by the Figs. 1(e)-1(g). The laser pulse, with a pulse energy of 600 J / m 2 and a spot size of 12.5ϫ 7.5 m 2 , was applied on t...

show abstract

“…이로 인해 자동차 부 품의 고체 윤활막, 인공 골절, 면도날 등 다양한 트라 이볼로지 분야에 적용이 가능하다 [1,2]. 그러나 DLC박 막의 높은 잔류 응력과 탄소-탄소 결합의 불안정성 때 문에 DLC 막 자체가 스스로 벗겨지는 현상이 발생하 여 응용에 어려움이 있다 [3]. 이러한 현상은 주로 높은 응력에 의해 발생하며 응력은 박막의 두께와 비례하기 때문에 박막이 두꺼워질수록 밀착력이 감소하게 된다.…”

Section: 서 론unclassified

Evaluation of Failure Modes and Adhesion of DLC Films by Scratch Test

Kim¹,

Park²,

Ahn³

2017

Journal of the Korean Society of Tribologists and Lubrication E

View full text Add to dashboard Cite

− In order to characterize the adhesive properties and failure mechanisms of diamond-like carbon (DLC) films of two different thicknesses (130 nm and 1.2 µm), deposited by plasma-enhanced chemical vapor deposition on a Si substrate, scratch testing with a micro-indenter (12.5 µm tip radius) was performed under a linearly increasing load. These scratch tests were conducted under the same test conditions for both films. The critical load of each film was estimated from the scratch test results, based on a sharp increase in the coefficient of friction and a clear distinction of failure modes. The critical load was the basis for evaluating the adhesion strength of the films, and the 1.2 µm-thick DLC film had superior adhesion strength. For better understanding of the failure modes, the following analyses were conducted: friction behavior and scratch tracks analysis using scanning electron microscopy, energy-dispersive spectroscopy, and 3-D profilometry. The scratch test results showed that failure modes were related to the thickness of the films. The 130 nm-thick DLC film underwent cohesive failure modes (cracks and chipping) before reaching to a gross failure stage. On the other hand, the thicker DLC film (1.2 µm-thick) did not exhibit micro cracks before a sudden gross failure of the film together with the evidence of cracking and chipping of the Si substrate.

show abstract

Stress relief forms of diamond-like carbon thin films under internal compressive stress

Cited by 124 publications

References 12 publications

Stress relief behaviour of diamond-like carbon films on glasses

Stress relief behaviour of diamond-like carbon films on glasses

Laser-induced wavy pattern formation in metal thin films

Evaluation of Failure Modes and Adhesion of DLC Films by Scratch Test

Contact Info

Product

Resources

About