Abstract:− In order to characterize the adhesive properties and failure mechanisms of diamond-like carbon (DLC) films of two different thicknesses (130 nm and 1.2 µm), deposited by plasma-enhanced chemical vapor deposition on a Si substrate, scratch testing with a micro-indenter (12.5 µm tip radius) was performed under a linearly increasing load. These scratch tests were conducted under the same test conditions for both films. The critical load of each film was estimated from the scratch test results, based on a sharp … Show more
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