SSP
 1997
DOI: 10.4028/www.scientific.net/ssp.57-58.355
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Strain and Gettering in Epitaxial Silicon Wafers

F.G. Kirscht
1
,
Mohammad Bagher Shabani
2
,
Takeo Yoshimi3
et al.
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Gettering in Silicon

McHugo
1
,
Hieslmair
2
1999
Wiley Encyclopedia of Electrical and Electronics Engineering
3
0
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Gettering in Silicon

McHugo
1
,
Hieslmair
2
1999
Wiley Encyclopedia of Electrical and Electronics Engineering
3
0
3
0
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Chemistry of Semiconductor Impurity Processing

2023
Chemistry of Semiconductors
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Mechanisms of transition-metal gettering in silicon

Myers
1
,
Seibt
2
,
Schröter
3
2000
Journal of Applied Physics
271
5
155
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