Stiction in surface micromachining

Tas, Niels Roelof; Sonnenberg, T.; Jansen, Henricus V.; Legtenberg, R.; Elwenspoek, M.

doi:10.1088/0960-1317/6/4/005

Cited by 501 publications

(287 citation statements)

References 54 publications

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“…This corresponds to x = d/3 for microstructures with linear stiffness. Hence, β can be defined as (3) where V pull is calculated according to the model of equation (1). Figure 8 shows calculated values of β corresponding to the data of figure 6.…”

Section: Single-degree-of-freedom Modelmentioning

confidence: 99%

“…This problem has been the focus of many recent studies, for example, Coster et al [26], Qian [21] and Tas et al [3]. Cantilever microbeams do not suffer from mid-plane stretching (the integral term in equation (3) is zero).…”

Section: Response Of Mems Devices Employing Cantilever Microbeamsmentioning

confidence: 99%

“…Tas et al [3] conducted a shock analysis on clamped-clamped and cantilever microbeams; however they did not account for the simultaneous effect of electrostatic forces and shock. Coster et al [26] modeled the performance of an RF MEMS switch actuated by electrostatic force and subjected to shock using an SDOF system.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces

Younis

Miles²,

Jordy³

2006

J. Micromech. Microeng.

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There is strong experimental evidence for the existence of strange modes of failure of microelectromechanical systems (MEMS) devices under mechanical shock and impact. Such failures have not been explained with conventional models of MEMS. These failures are characterized by overlaps between moving microstructures and stationary electrodes, which cause electrical shorts. This work presents modeling and simulation of MEMS devices under the combination of shock loads and electrostatic actuation, which sheds light on the influence of these forces on the pull-in instability. Our results indicate that the reported strange failures can be attributed to early dynamic pull-in instability. The results show that the combination of a shock load and an electrostatic actuation makes the instability threshold much lower than the threshold predicted, considering the effect of shock alone or electrostatic actuation alone. In this work, a single-degree-of-freedom model is utilized to investigate the effect of the shock-electrostatic interaction on the response of MEMS devices. Then, a reduced-order model is used to demonstrate the effect of this interaction on MEMS devices employing cantilever and clamped-clamped microbeams. The results of the reduced-order model are verified by comparing with finite-element predictions. It is shown that the shock-electrostatic interaction can be used to design smart MEMS switches triggered at a predetermined level of shock and acceleration.

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Section: Single-degree-of-freedom Modelmentioning

confidence: 99%

Section: Response Of Mems Devices Employing Cantilever Microbeamsmentioning

confidence: 99%

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Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces

Younis

Miles²,

Jordy³

2006

J. Micromech. Microeng.

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“…From the energy perspective, the effective surface tension force applied on the fluid column can be deduced from the derivative of the surface energy of the whole fluidic system with respect to the spatial coordinate [4]. Figure 2 is the configuration of a capillary microchannel.…”

Section: Surface Energy Of a Capillary Microchannelmentioning

confidence: 99%

The marching velocity of the capillary meniscus in a microchannel

Yang

Yao

Tai

2003

J. Micromech. Microeng.

131

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In this paper we describe an experimental method and an analytical model for characterizing the surface energy inside a microchannel of micrometer size by measuring the marching velocity or position of a capillary meniscus. This method is based on the fact that the force summation of the meniscus surface tension and the filling reservoir gravitation might produce a pressure to pull liquid into the channel, and the marching velocity or the instantaneous position of the meniscus is related to the surface energy. Both parylene and silicon-nitride microchannels with different surface conditions were fabricated to perform the fill-in experiments subject to different liquids. It is shown that our model agrees well with the experimental data and is a valid method.

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“…A typical problem of the wet etching process is the stiction, which causes that fabricated structures stick on the substrate from a critical length due to the smoothness of the surface [16].…”

Section: Stictionmentioning

confidence: 99%

Characterisation of the fabrication process of freestanding SU-8 microstructures integrated in printing circuit board in microelectromechanical systems

Perdigones¹,

Luque²,

Quero³

2010

Micro Nano Lett.

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The characterization of the fabrication process to develop free-standing SU-8 structures integrated in PCBMEMS (Printing Circuit Board in Microelectromechanical Systems) technology is presented. SU-8 microcantilevers, microbridges, microchannels and micromembranes have been fabricated following the described procedure. Adherence between FR4 substrate and SU-8 has been studied using the destructive blister method, determining the surface energy. Residual thermal stress has also been analyzed for this integration and compared when using other substrates. Moreover, a study of the copper wet etching with cupric chloride has been performed in order to characterize how this isotropic etching affects the geometry of the copper structures. Finally, stiction has been observed and examined, determining the adhesion energy responsible of this effect.

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Stiction in surface micromachining

Cited by 501 publications

References 54 publications

Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces

Investigation of the response of microstructures under the combined effect of mechanical shock and electrostatic forces

The marching velocity of the capillary meniscus in a microchannel

Characterisation of the fabrication process of freestanding SU-8 microstructures integrated in printing circuit board in microelectromechanical systems

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