“…4,7,13,17,20,29 Experimental knowledge of sticking coefficients has been rather scarce until recently. 4,7,8,11,12,[29][30][31] The most straightforward way of analysing the kinetics is by interpreting film termination profiles measured in dedicated test structures or in a cross-flow reactor, where a steep film termination profile is generally associated with high reactivity. 11,12,29,30,32,33 Recently, microscopic lateral high-aspect-ratio (LHAR) test channels have emerged for thickness profile measurements.…”