Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices

Auciello, Orlando; Sumant, Anirudha V.

doi:10.1016/j.diamond.2010.03.015

Cited by 223 publications

(198 citation statements)

References 75 publications

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“…In the literature, no attempt was made to clarify whether the deformation of single crystal silicon and polysilicon occurs in the same way or not. Similarly, ultra nanocrystalline diamond (UNCD) is gaining significant research interest across a range of engineering disciplines mainly because it rivals single crystal diamond in terms of high hardness [21] and low coefficient of friction.…”

Section: Introductionmentioning

confidence: 99%

Influence of microstructure on the cutting behaviour of silicon

et al. 2016

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General rights Copyright for the publications made accessible via the Queen's University Belfast Research Portal is retained by the author(s) and / or other copyright owners and it is a condition of accessing these publications that users recognise and abide by the legal requirements associated with these rights. Abstract:We use molecular dynamics simulation to study the mechanisms of plasticity during cutting of monocrystalline and polycrystalline silicon. Three scenarios are considered: (i) cutting a single crystal silicon workpiece with a single crystal diamond tool, (ii) cutting a polysilicon workpiece with a single crystal diamond tool, and (iii) cutting a single crystal silicon workpiece with a polycrystalline diamond tool. A long-range analytical bond order potential is used in the simulations, providing a more accurate picture of the atomic-scale mechanisms of brittle fracture, ductile plasticity, and structural changes in silicon. The MD simulation results show a unique phenomenon of brittle cracking typically inclined at an angle of 45° to 55° to the cut surface, leading to the formation of periodic arrays of nanogrooves in monocrystalline silicon, which is a new insight into previously published results. Furthermore, during cutting, silicon is found to undergo solid-state directional amorphisation without prior Si-I to Si-II (beta tin) transformation, which is in direct contrast to many previously published MD studies on this topic. Our simulations also predict that the propensity for amorphisation is significantly higher in single crystal silicon than in polysilicon, signifying that grain boundaries eases the material removal process.

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Section: Introductionmentioning

confidence: 99%

Influence of microstructure on the cutting behaviour of silicon

et al. 2016

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“…Single-crystal diamond is one example from an extensive list of materials-many with attractive optical properties-for which high-quality thin film heterolayer structures do not exist. Despite wafer-scale polycrystalline diamond thin films on foreign substrates being readily available, these films typically exhibit inferior properties due to scattering and absorption losses at grain boundaries, significant surface roughness and large interfacial stresses [2][3][4] . In the absence of suitable heteroepitaxial diamond growth, substantial efforts by the diamond photonics and quantum optics community have focused on novel processing techniques to yield nanoscale singlecrystal diamond optical elements [5][6][7][8][9][10][11] .…”

mentioning

confidence: 99%

High quality-factor optical nanocavities in bulk single-crystal diamond

et al. 2014

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Single-crystal diamond, with its unique optical, mechanical and thermal properties, has emerged as a promising material with applications in classical and quantum optics. However, the lack of heteroepitaxial growth and scalable fabrication techniques remains the major limiting factors preventing more wide-spread development and application of diamond photonics. In this work, we overcome this difficulty by adapting angled-etching techniques, previously developed for realization of diamond nanomechanical resonators, to fabricate racetrack resonators and photonic crystal cavities in bulk single-crystal diamond. Our devices feature large optical quality factors, in excess of 10 5 , and operate over a wide wavelength range, spanning visible and telecom. These newly developed high-Q diamond optical nanocavities open the door for a wealth of applications, ranging from nonlinear optics and chemical sensing, to quantum information processing and cavity optomechanics.

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“…Transparent devices, however, can be produced in diamond technology thanks to the last decades' efforts in growing diamond on transparent substrates, like glass, quartz or even high-temperaturestable plastic [15][16][17]. It was even possible to combine diamond with CMOS (Complementary Metal Oxide Semiconductor) technologies on sapphire whereby a tolerable transparency could be preserved [18]. More recently, the first prototypes of NCD microelectrode arrays on transparent substrate were fabricated [19] and we lately reported on a first 2 × 2 microelectrode array out of boron-doped NCD on sapphire [20].…”

Section: Introductionmentioning

confidence: 99%

“…There is considerable interest in the integration of read-out electronics and NCD on a transparent substrate [18]. We have recently reported on the monolithic fabrication of GaN-based ion-sensitive field effect transistors (ISFETs) with boron-doped NCD gate electrodes working in amperometric and potentiometric modes [29].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of a NCD microelectrode array for amperometric detection with micrometer spatial resolution

Colombo

Men

Scharpf

et al. 2011

Diamond and Related Materials

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We report on the fabrication of a boron-doped nanocrystalline diamond (NCD) 3 × 3 high-density microelectrode array (MEA) for amperometric measurements, with a single electrode area of 3 × 5 μm 2 and a separation in the μm scale. The NCD microelectrodes were grown by hot filament chemical vapor deposition (HFCVD) on a double-side polished sapphire wafer in order to preserve the diamond transparency. Bias enhanced nucleation (BEN) was performed to ensure a covalent adhesion of the films to the substrate. A current background noise of less than 5 pA peak to peak over a 1 kHz bandwidth resulted from an electrochemical investigation of the new device, using 100 mM KCl solutions and ferrocyanide red-ox couples. Cyclic voltammetry measurements in physiological buffer solution and in the presence of oxidizable biomolecules strengthened its suitability for bio-sensing. When compared to a 2 × 2 NCD microelectrode array prototype, already used for in vitro cell measurements, the signal to noise ratio of the amperometric response of the new 3 × 3 device proved twice as good. In addition, the optical transmittance of the boron-doped thin layers exceeded 40% in the visible wavelength range. The excellent electrochemical properties of NCD electrodes and the transparency in combination with the high spatial resolution make the new 3 × 3 NCD MEA a promising tool for electrochemical sensing in a variety of applications, ranging from medical to industrial, in neutral or harsh environments.

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Status review of the science and technology of ultrananocrystalline diamond (UNCD™) films and application to multifunctional devices

Cited by 223 publications

References 75 publications

Influence of microstructure on the cutting behaviour of silicon

Influence of microstructure on the cutting behaviour of silicon

High quality-factor optical nanocavities in bulk single-crystal diamond

Fabrication of a NCD microelectrode array for amperometric detection with micrometer spatial resolution

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