2013
DOI: 10.7567/jjap.52.11nc04
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Stable Molecules in N2–H2Plasmas Measured Using a Quartz Sensor

Abstract: Stable molecules of N2, H2, and NH3 in N2–H2 plasmas were investigated using a quartz sensor (Q-sensor). Changes in the pressure- and temperature-normalized Q-sensor output (NQO) induced by plasma with radio-frequency (rf) input power were measured near plasma electrodes and shown to correlate to the relative ion signal intensity from NH3. The results confirm that gas composition changes in N2–H2 plasmas can be successfully measured from the NQO changes using the Q-sensor. The spatial distribution of NQO indic… Show more

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Cited by 7 publications
(4 citation statements)
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“…Gómez-Ramírez et al [110] found that the best energy efficiency was achieved with the feed gas ratio equal or close to the stoichiometric ratio. This conclusion is in line with many previously reported researches [110][111][112][113][114]. On the other hand, other studies have shown that a higher N 2 /H 2 is favoured for the ammonia production [107,112,[115][116][117][118][119].…”
Section: Direct Synthesis Of Ammonia From N 2 and Hsupporting
confidence: 92%
“…Gómez-Ramírez et al [110] found that the best energy efficiency was achieved with the feed gas ratio equal or close to the stoichiometric ratio. This conclusion is in line with many previously reported researches [110][111][112][113][114]. On the other hand, other studies have shown that a higher N 2 /H 2 is favoured for the ammonia production [107,112,[115][116][117][118][119].…”
Section: Direct Synthesis Of Ammonia From N 2 and Hsupporting
confidence: 92%
“…The experimental apparatus used in this study has been described in detail in our previous work. 7) Essentially, our plasma chamber is a conventional one that includes parallel plasma electrodes for rf (13.56 MHz) discharges.…”
Section: Methodsmentioning
confidence: 99%
“…Quartz sensor (Q-sensor) measurement can detect changes in the gas compositions of plasmas because the pressureand temperature-normalized Q-sensor output (NQO) depends only on the viscosity and molecular weight of the measured gas. [1][2][3][4][5][6][7][8] Q-sensor measurement can selectively derive only the information on stable gas molecules in plasmas when a mesh cover is used to prevent reactive chemical species in the plasmas from reaching the quartz oscillator, which is a sensing device installed in the Q-sensor. Q-sensor measurement is a useful plasma diagnostic method, although it cannot yield information on each chemical species in plasmas, which can be derived by gas analysis using a mass spectrometer.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, ρ can be expressed as a product of the molecular weight (M) and pressure (P) of the gas. Therefore, the output from a quartz oscillator depends on ç and M. This means that the Qgauge can detect not only the change in pressure, but also the content of the gas, making it applicable to hydrogen sensing, hydrogen concentration measurements, partial concentration measurements of binary gases, and plasma diagnostics [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%