Dependence of composition of stable molecules in N₂–H₂plasmas on nitrogen gas flow rate ratio measured using a quartz sensor

Abstract

Compositions of stable molecules in N 2 -H 2 plasmas measured using a quartz sensor (Q-sensor) were compared with those measured using a quadrupole mass spectrometer (QMS) under various nitrogen gas flow rate ratio to determine the applicability of Q-sensor measurement to N 2 -H 2 plasmas. The nitrogen flow rate ratio dependence of the Q-sensor results obtained 20 mm from the edge of the plasma electrodes (Z = 20 mm) tended to agree more qualitatively with the NH 3 density measured by QMS compared with those measured at 70 mm. For pure nitrogen or hydrogen plasma, the results measured at Z = 20 mm differed from those of gas analyses using QMS. The analysis indicated that Q-sensor results obtained near discharges with various nitrogen flow rate ratios reflect information on stable molecules such as N 2 , H 2 , and NH 3 but yield information on other stable molecules or other chemical species in pure N 2 and H 2 plasmas.

Humidity Calibration for a Pressure Gauge Using a Temperature-Stable Quartz Oscillator

“…In addition, ρ can be expressed as a product of the molecular weight (M) and pressure (P) of the gas. Therefore, the output from a quartz oscillator depends on ç and M. This means that the Qgauge can detect not only the change in pressure, but also the content of the gas, making it applicable to hydrogen sensing, hydrogen concentration measurements, partial concentration measurements of binary gases, and plasma diagnostics [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20].…”