Stability of PtAl2O3-based electrode langasite SAW sensors with Al2O3 capping layer and yttria-stablized zirconia sensing layer

Maskay, A.; Ayes, Armando; Cunha, M. Pereira da

doi:10.1109/ultsym.2017.8092442

Cited by 5 publications

(2 citation statements)

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“…A. Maskay et al reported an LGS temperature sensor using Pt/Al 2 O 3 as an electrode and tested its stability. The temperature was circulated for 110 h at 300 °C to 750 °C, and the frequency offset was 0.05% under six tests at 750 °C [ 11 ]. However, the traditional quartz material attenuates the sound speed and change the phase after exceeding a certain temperature, which makes it no longer suitable for temperature measurement [ 12 ].…”

Section: Introductionmentioning

confidence: 99%

Temperature Performance Study of SAW Sensors Based on AlN and AlScN

et al. 2023

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In this paper, the temperature performance of AlN-SAW resonators and AlScN-SAW resonators is studied. They are simulated by COMSOL Multiphysics, and their modes and the S11 curve are analyzed. The two devices were fabricated using MEMS technology and tested using VNA, and the test results were consistent with the simulation results. Temperature experiments were carried out with temperature control equipment. With the change in temperature, the changes in S11 parameters, TCF coefficient, phase velocity, and quality factor Q were analyzed. The results show that the temperature performance of the AlN-SAW resonator and the AlScN-SAW resonator is very good, and both have good linearity. At the same time, the sensitivity of the AlScN-SAW resonator is greater by 9.5%, the linearity is greater by 15%, and the TCF coefficient is greater by 11.1%. The temperature performance is excellent, and it is more suitable as a temperature sensor.

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Section: Introductionmentioning

confidence: 99%

Temperature Performance Study of SAW Sensors Based on AlN and AlScN

et al. 2023

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“…Одним из ключевых требований для дальнейшего развития ММА на основе ПАВ и подобных устройств является поиск новых пьезоэлектрических материалов для консоли чувствительного элемента (ЧЭ), которые могли бы преодолеть типичные ограничения существующих прототипов [8][9][10][11].…”

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Selection of the Material for the Sensitive Elements of SAW-based Accelerometers

Шевченко

Mikhailenko

Лукьянов

2020

Izv. vysš. učebn. zaved. Ross., Radioèlektron.

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Introduction. At the present, sensors based on surface acoustic waves (SAW) is a rapidly developing direction and a promising replacement for classical sensors, especially in those areas where long-term performance of latter is questionable. The principle of operation of SAW sensors is based on acoustic vibrations, therefore, the choice of piezoelectric material of а console, considering external influences on a future device and its operating conditions, is the most important task. Currently, many monocrystalline structures and their sections have been synthesized and created for the devices using SAW. The main materials used for the manufacture of substrates are crystals of quartz (SiO2), lithium niobate (LiNbO3), lithium tantalate (LiTaO3) and film aluminum nitride (AlN). Also, new crystal structures: langasite (La3Ga5SiO14), langatate (La3Ga5.5Ta0.5O14), langanite and others were produced. The problem of using such materials for the manufacture of consoles is the lack of systematized data on important characteristics for the propagation of surfactants, for example, the elasticity tensor of the 4th rank. One of the key problems for the further development of SAW-based sensors is the one-way fastening of rectangular and triangular sensitive elements (SE) in sensor housing. In order to overcome the above drawback an MMA surfactant thing based on a membrane SE for a more uniform distribution of a load over the surface of the SE was proposed.Aim. To show the advantages of using AlN as the SE material of a ring wave resonator on SAW.Materials and methods. The theoretical part of the research was carried out using the finite element method. Mathematical processing was implemented in AutoCAD 2019 and in COMSOL Multiphysics 5.4.Results. The use of AlN, which acts as the SE material for measuring an acceleration based on SAW was proposed. The proposed solution was compared with existing prototypes based on the use of SiO2 / LiNbO3 membranes, which were characterized by strong anisotropic properties. A 3D model of the SE of a ring wave resonator on surface waves was created. Using computer simulations and COMSOL Multiphysics software, it was shown that the thing was capable to withstand exposures in excess of 10 000 g, and an isotropic AlN sensor overcomed the limitations of both the low sensitivity of SiO2 and the low temperature stability of LiNbO3. AlN demonstrated almost double resistance to irreversible mechanical deformations as compared to SiO2, which, in turn, allows an additional 1.5-fold increase in sensitivity compared to quartz – based sensors.Conclusion. Based on the data obtained by the modeling, it can be concluded that the use of AIN as SE material is promising, especially for measuring high acceleration values, but with restrictions on temperature sensitivity of the material.

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