Temperature Performance Study of SAW Sensors Based on AlN and AlScN

Wang, Hui; Zhang, Linwei; Zhou, Zhixin; Lou, Liang

doi:10.3390/mi14051065

Cited by 8 publications

(4 citation statements)

References 21 publications

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“…To evaluate effect of the cascaded connection in the sensitivity of the SAWR, the temperature as the variant has been used in this experiment. As the SAW velocity is the function of the temperature, 16 the change in the temperature effects the velocity of the SAW wave which further creates a frequency shift in the resonant frequency of the SAWR. The resulted frequency shift can be given using Equation ( 2) which shows that the resulted frequency shift is the linear function of the temperature.…”

Section: Methodsmentioning

confidence: 99%

Increasing temperature sensing resolution using multiple non-continuous cascade connected SAWRs

Desai,

Zhang,

Vattaparambil

et al. 2024

Active and Passive Smart Structures and Integrated Systems XVIII

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This paper proposes a novel approach of multiple non-continuous cascade-connected one-port Surface Acoustic Wave Resonators (SAWRs) at operating frequency of 433.42 MHz to improve the resolution of temperature sensing. Three different sets of SAWR-based temperature sensors have been experimented using one, two, and three cascade connected commercial SAWR(s) to evaluate performance, including sensitivity and sensing resolution, of the temperature sensor with respect to increasing the number of SAWRs in cascade connection. The frequency shifts of all three different configurations were measured at the same time w.r.t. the change in the temperature. The sensitivity is calculated as the ratio of the total frequency shift to the total temperature change. Results demonstrated that not only the sensitivity of the sensor but also the resolution of the sensor to sense the temperature is increased with increasing the number of SAWRs in the cascade connection. Maximum sensitivity on average of 681.81 Hz/°C was noted with 3 SAWRs which is 33.3% higher than the sensitivity of 1 SAWR which was on average 454.54 Hz/°C. Additionally, 1 SAWR could detect on average 9.46 °C of change in the temperature while 3 SAWRs could detected 6.74 °C of change in the temperature, proving the higher resolution of temperature sensing with a greater number of SAWRs. This unique approach of increasing resolution and sensitivity of the sensor can help to develop sensor array using SAWRs which can be operated using single device.

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Section: Methodsmentioning

confidence: 99%

Increasing temperature sensing resolution using multiple non-continuous cascade connected SAWRs

Desai,

Zhang,

Vattaparambil

et al. 2024

Active and Passive Smart Structures and Integrated Systems XVIII

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“…Aluminum nitride (AlN) films have been applied in a number of important areas such as ultraviolet photodetectors, − nonlinear optical devices, , microelectro-mechanical systems (MEMS) devices, − and acoustic wave filters − due to their high-temperature stability, large sound velocity, superior piezoelectric response, and compatibility with the complementary metal-oxide-semiconductor (CMOS) processing. Previous studies were primarily focused on compositional and structural tuning for the enhanced piezoelectric responses in AlN films, but limited attention has been given to the photoinduced dielectric properties.…”

Section: Introductionmentioning

confidence: 99%

Observation of Photodielectric Effect in Aluminum Nitride Piezoelectric Films

Yang,

Sun,

Uddin

et al. 2024

ACS Appl. Electron. Mater.

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Piezoelectric semiconductors hold great promise for the development of optoelectronic devices due to the presence of a photodielectric effect (PDE), which has been observed in perovskite ferroelectric ceramics. However, the PDE in wurtzitestructured aluminum nitride (AlN) and how light affects dielectric properties remain unexplored. Here, we observed PDE of AlN films in the low-frequency region around 20 Hz to 1 MHz. The permittivity (ε r ) increased after light irradiation, and the change in ε r increased with larger photon energy, accompanied by an increase in dielectric loss (tan δ). For Sc 0.15 Al 0.85 N, the change in Δε was significantly larger compared to AlN, whereas the variation of tan δ became smaller. The PDE exhibited reversible light-induced switching of piezoelectric polarization, and the time required for ε r to saturate under light illumination was shorter for Sc 0.15 Al 0.85 N than AlN. This work provides a fundamental understanding for photocontrolled piezoelectric properties for exploration of better piezoelectric semiconductors with photodielectric behavior.

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“…High-voltage switchgear is an important component of power equipment with a complex internal structure, operating in a closed environment and under high voltage and current conditions. When the electrical resistance of the switch contacts ages or the contact resistance becomes too high, it can lead to a continuous increase in temperature, ultimately resulting in accidents such as fires and power outages [2]. To prevent such incidents, real-time temperature monitoring is required in high-voltage switchgear.…”

Section: Introductionmentioning

confidence: 99%

Design and Characterization of Surface Acoustic Wave-Based Wireless and Passive Temperature Sensing System

Zhou,

Wang,

Lou

2024

Micromachines

Self Cite

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The surface acoustic wave (SAW) temperature sensor has received significant attention due to its wirelessly powered, battery-free, and chipless capabilities. This paper proposes a wireless sensing system comprising a one-port SAW resonator, helix antenna, and transceiver circuit. The SAW resonator used in this system is based on aluminum nitride (AlN) thin film, which exhibits high velocity and excellent piezoelectric properties. Simulations and experiments were conducted to investigate the performance of the designed SAW resonator. A helix antenna was also designed using finite element simulation to facilitate signal transmission between the SAW temperature sensor and the transceiver. An impedance-matching network was introduced between the helix antenna and the SAW resonator to optimize signal transmission. When the wireless SAW temperature sensor was placed within a certain distance of the mother antenna, the reflection peak of the SAW resonator was observed in the spectrum of the return signal. The frequency of the echo signal increased almost linearly as the temperature increased during the temperature tests. The fitted temperature coefficient of frequency (TCF) was −31.34 ppm/°C, indicating that the wireless temperature sensing system has high-temperature sensitivity.

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Temperature Performance Study of SAW Sensors Based on AlN and AlScN

Cited by 8 publications

References 21 publications

Increasing temperature sensing resolution using multiple non-continuous cascade connected SAWRs

Increasing temperature sensing resolution using multiple non-continuous cascade connected SAWRs

Observation of Photodielectric Effect in Aluminum Nitride Piezoelectric Films

Design and Characterization of Surface Acoustic Wave-Based Wireless and Passive Temperature Sensing System

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